1994
DOI: 10.1063/1.111702
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Coulomb blockade in a silicon tunnel junction device

Abstract: Single electron tunnel junctions have been formed in ultrathin silicon-on-insulator material by electron beam lithography and dry etching. Clear Coulomb blockade effects have been observed at 300 mK in the current-voltage characteristics as a function of the voltage applied to a control sidegate. The effects are not smeared out by thermal fluctuations until temperatures greater than 4 K are reached.

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Cited by 89 publications
(29 citation statements)
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“…1,2 SETs based on silicon are advantageous for incorporation into established CMOS fabrication lines, and devices have been reported in crystalline material, particularly silicon-on-insulator. These use either lithographically defined islands 3,4 or multipletunnel junctions created by material/structural disorder effects. 5,6 By contrast, polycrystalline silicon has been somewhat neglected for SET applications despite a greater flexibility of fabrication.…”
Section: ͓S0003-6951͑98͒02534-0͔mentioning
confidence: 99%
“…1,2 SETs based on silicon are advantageous for incorporation into established CMOS fabrication lines, and devices have been reported in crystalline material, particularly silicon-on-insulator. These use either lithographically defined islands 3,4 or multipletunnel junctions created by material/structural disorder effects. 5,6 By contrast, polycrystalline silicon has been somewhat neglected for SET applications despite a greater flexibility of fabrication.…”
Section: ͓S0003-6951͑98͒02534-0͔mentioning
confidence: 99%
“…Single-electron devices such as single-electron transistors (SETs), based on SiNWs, have been defined using various approaches [11][12][13]. A widely investigated approach is to pattern a NW along its length, using either constrictions [22][23][24][25] or pattern dependent oxidation (PADOX) [15,26]. The later technology utilises areas of increased stress, e.g.…”
Section: Silicon Nanowiresmentioning
confidence: 99%
“…2 In order to investigate fundamental quantum phenomena, Si quantum wires and dots have been fabricated. [3][4][5] Regarding the fabrication processes which are compatible with the present Si technology, methods utilizing crystallographic anisotropy of Si have been proposed to design uniform Si nanostructures. [6][7][8] However, it is strongly desirable to develop an alternate fabrication process for designing the required nanostructures which cannot be obtained by utilizing such a crystallographic orientation.…”
Section: Introductionmentioning
confidence: 99%