Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Zhang, Zilong; Wu, Yuanzhao; Sang, Liwen; Wu, Hongpeng; Huang, Jian; Wang, Linjun; Takahashi, Y. K.; Li, Run-Wei; Koizumi, Satoshi; Toda, Masaya; Akita, Indianto Mohammad; Koide, Yasuo; Liao, Meiyong

doi:10.1080/21663831.2020.1734680

Cited by 27 publications

(12 citation statements)

References 24 publications

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“…A magnetic field sensitivity of 4.83 Hz/ mT and a detectable force of 2.14 × 10 −12 N were achieved at room temperature for the FeGa/diamond cantilever. Due to the large lattice mismatch between FeGa and diamond, the FeGa/SCD MEMS composite resonator could only be operated up to 300 °C [132].…”

Section: Diamond Mems Magnetic Sensormentioning

confidence: 99%

Progress in semiconductor diamond photodetectors and MEMS sensors

Liao

2021

Functional Diamond

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166

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Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily superior to those of the currently available wide-bandgap semiconductors for deep-ultraviolet (DUV) photoelectronics and microelectromechanical systems (MeMs). the wide-bandgap energy of diamond offers the intrinsic advantage for solar-blind detection of DUV light. the recent progress in high-quality single-crystal diamond growth, doping, and devices design have led to the development of solar-blind DUV detectors satisfying the requirement of high Sensitivity, high Signal-to-Noise ratio, high spectral Selectivity, high Speed, and high Stability. On the other hand, the outstanding mechanical hardness, chemical inertness, and intrinsic low mechanical loss of diamond enable the development of MeMs sensors with boosted sensitivity and robustness. the micromachining technologies for diamond developed in these years have opened the avenue for the fabrication of high-quality single-crystal diamond mechanical resonators. in this review, we report on the recent progress in diamond DUV detectors and MeMs sensors, which includes the device principles, design, fabrication, micromachining of diamond, and devices physics. the potential applications of these sensors and a perspective are also described.

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Section: Diamond Mems Magnetic Sensormentioning

confidence: 99%

Progress in semiconductor diamond photodetectors and MEMS sensors

Liao

2021

Functional Diamond

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166

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“…By depositing a magnetrostrictive FeGa thin film on the SCD cantilever, the external magnetic fields can be detected based on the resonance frequency shift. [ 107 ] Since both FeGa and SCD MEMS have high thermal stability, high‐temperature SCD MEMS magnetic sensors were developed operable up to

500\nobreakspace ^\circ

C. [ 108 ] The SCD MEMS magnetic sensor showed a noise level of 10 nT/

\sqrt {\rm Hz}

.…”

Section: Diamond Mems Devicesmentioning

confidence: 99%

Diamond MEMS: From Classical to Quantum

Sun,

Zhang,

Liu

et al. 2023

Adv Quantum Tech

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Diamond has numerous outstanding properties in mechanics, physics, chemistry, electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical systems (MEMS/NEMS) devices or hybrid quantum MEMS/NEMS systems. The extremely high mechanical strength and the ultra‐wide bandgap energy enable the development of mechanically and thermally robust MEMS/NEMS sensors and switches, while the long coherence time of spin defects center enables the reading out through optical methods, precise quantum sensing, and quantum information processing. In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fabrication process and the classic applications of diamond MEMS/NEMS devices are first described, including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline, and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy defect center, as well as the application referred to the hybrid system composed of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction, and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform for high‐performance and high‐reliability advanced classic MEMS devices but also for quantum sensing, information, and exploring the fundamentals of quantum mechanics.

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“…These results agree well and have a maximum difference of 3.12 μm at the free end of the harvester structure. On the other hand, the dynamic deflection yd(x) of the harvester structure was obtained from the static deflection ysj(x) using (19). For this, a quality factor of Qa = 56.86 due to air damping was estimated from the experimental data reported by Yu et al [41]:…”

Section: A First Case: Mems Hybrid Vibration Energy Harvester With Five Fixed Supportsmentioning

confidence: 99%

Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

et al. 2021

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Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity sensors. The design of these resonators requires analytical models to predict their mechanical behavior and optimize the sensitivity and resolution. However, most of these models are only applied to resonators with rectangular and uniform cross-sections. In this paper, we present the analytical modeling to determine the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and multiple fixed supports. The proposed modeling is derived using the well-known Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. This analytical modeling is applied to four multilayered resonators with different clamped supports and non-uniform cross-sections. The results of our analytical modeling agree well with respect to those of finite element method (FEM) models and experimental data reported in the literature. The proposed analytical modeling can be used to estimate the frequency shift of resonators due to variations of their geometric parameters, number of clamped-supports or mechanical properties of the materials. Furthermore, this modeling can be used to obtain optimal designs of resonators that ensure safe operations and enhanced performance for sensors and energy harvesters in telecommunications, automotive sector, aerospace industry, consumer electronics, non-destructive testing, and navigation.

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Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Cited by 27 publications

References 24 publications

Progress in semiconductor diamond photodetectors and MEMS sensors

Progress in semiconductor diamond photodetectors and MEMS sensors

Diamond MEMS: From Classical to Quantum

Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

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