Diamond MEMS: From Classical to Quantum

Abstract

Diamond has numerous outstanding properties in mechanics, physics, chemistry, electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical systems (MEMS/NEMS) devices or hybrid quantum MEMS/NEMS systems. The extremely high mechanical strength and the ultra‐wide bandgap energy enable the development of mechanically and thermally robust MEMS/NEMS sensors and switches, while the long coherence time of spin defects center enables the reading out through optical methods, precise quantum sensing, and quantum information processing. In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fabrication process and the classic applications of diamond MEMS/NEMS devices are first described, including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline, and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy defect center, as well as the application referred to the hybrid system composed of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction, and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform for high‐performance and high‐reliability advanced classic MEMS devices but also for quantum sensing, information, and exploring the fundamentals of quantum mechanics.

Low-Energy Dissipation Diamond MEMS

“…Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) stand out as a cutting-edge multidisciplinary field based on the interaction between electrical and mechanical components. MEMS devices offer promising applications in automation, industry, edge computing, augmented/virtual reality, biomedicine, telecommunications, and quantum mechanics, because of their advantages of smaller, faster, more sensitive, integrability, and low power consumption. , The past decades have witnessed explosive growth of silicon-based MEMS due to compatibility with the mature complementary metal-oxide-semiconductor (CMOS) industry. High-frequency and high-quality ( Q ) factor or low dissipation (or loss) as well as high-reliability MEMS/NEMS resonators have been pursued for better device properties, such as high sensitivity, high resolution, strong robustness to heat and radiation, and resilience against wear and mechanical attack, for the development of health care for human beings, artificial intelligence, autonomous driving, smart robot,s and space exploration .…”