Coupling of single mode fibers to planar Si waveguides using vertically tapered mode converters

Frish, Michael B.; Fijol, J.J.; Fike, Eugene E.; Jacobson, S. A.; Keating, P.; Kessler, William J.; LeBlanc, John J.; Bozler, C.O.; Fritze, M.

doi:10.1364/ipr.2002.ifb2

Cited by 14 publications

(9 citation statements)

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“…There are two strategies for coupling light into the on-chip waveguides. The first one is to focus the light into the waveguide end-face at the chip edge [28]. The coupling efficiency can be improved with lensed fibers, vertical tapers [28], or graded refractive index lenses [29].…”

Section: Grating Couplersmentioning

confidence: 99%

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Reducing the temperature sensitivity of SOI waveguide-based biosensors

2012

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Label-free photonic biosensors fabricated on silicon-on-insulator (SOI) can provide compact size, high evanescent field strength at the silicon waveguide surface, and volume fabrication potential. However, due to the large thermo optic coefficient of water-based biosamples, the sensors are temperature-sensitive. Consequently, active temperature control is usually used. However, for low cost applications, active temperature control is often not feasible.Here, we use the opposite polarity of the thermo-optic coefficients of silicon and water to demonstrate a photonic slot waveguide with a distribution of power between sample and silicon that aims to give athermal operation in water.Based on simulations, we made three waveguide designs close to the athermal point, and asymmetric integrated MachZehnder interferometers for their characterization. The devices were fabricated on SOI with a 220 nm device layer and 2 µm buried oxide, by electron beam lithography of hydrogen silsesquioxane (HSQ) resist, and etching in a Cl 2 /HBr/O 2 /He plasma. With Cargile 50350 fused silica matching oil as top cladding, the group index of the three guides varies from 1.9 to 2.8 at 1550 nm. The temperature sensitivity of the devices varied from -70 to -160 pm/K under the same conditions. A temperature sensitivity of -2 pm/K is projected with water as top cladding.

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Section: Grating Couplersmentioning

confidence: 99%

“…The first one is to focus the light into the waveguide end-face at the chip edge [28]. The coupling efficiency can be improved with lensed fibers, vertical tapers [28], or graded refractive index lenses [29]. However, in all cases, it is required to polish the input waveguide end-face, making this option inconvenient and costly.…”

Section: Grating Couplersmentioning

confidence: 99%

Reducing the temperature sensitivity of SOI waveguide-based biosensors

2012

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“…However, the thickness of the devices coupled to such tapers was typically large, in excess of 2 µm [12], which simplifies the problem. The most successful vertical tapers in silicon have been reported by Frish et al [13] and Fijol et al [14]. The *g.reed@surrey.ac.uk; phone +44 (0)1483 689122; fax + 44 (0)1483 689404 later reported 0.66 dB insertion loss (IL) for a taper with 11.5 × 11.5 µm input, and 3 × 3 µm output facets.…”

Section: Introductionmentioning

confidence: 99%

A grating-based coupler for fiber-to-silicon waveguide excitation

et al. 2004

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Recently there has been a strong trend to fabricate smaller photonic devices. In the literature, the problem of coupling optical fibres with thin semiconductor waveguides has not been solved sufficiently well to obtain both high coupling efficiency and good fabrication tolerances. This paper discusses a new approach, the Dual Grating-Assisted Directional Coupling (DGADC), which can result in a robust and very efficient device, with relaxed fabrication tolerances. Theoretical investigation of the coupler is presented. Coupling efficiency and device length are determined as functions of layer thicknesses and refractive indices, grating periods, depths and duty ratios, and finally wavelength. Fabrication of the coupler is also given, as well as preliminary experimental results.

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“…In analogy with electronic integrated circuits, the possibility of combining several optical processing functions on a single miniature platform, 1 make conceivable integrated all optical circuits [1]. Also called Planar Optical Chips or Circuits, this devices incorporate functional optical components like linear or curved waveguides, filter devices (controlling the spectra characteristic as Bragg grating), lenses and mirrors, and electro-optic phase or amplitude modulator waveguides like an Integrated Mach-Zehnder Interferometer.…”

Section: Introductionmentioning

confidence: 99%

Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application

Gundel¹,

Cardin²,

Averty³

et al. 2003

Ferroelectrics

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In order to develop optical waveguide structures using Pb(ZrTi)O 3 ferroelectric thin films, chemical solution deposition and spin-coating on glass substrates were studied. Classical photolithography and wet chemical etching method were applied for the realization of linear and Mach-Zehnder type waveguide structures, having a width of up to 100 "m and a irregularity of the border in the 1 "m region for an overall length of 20 mm. Optical characterization allows to qualify the ferroelectric material in terms of use for telecommunication applications, coupling of laser light by the M-lines technique allows to study light propagation and the related propagation losses.

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Coupling of single mode fibers to planar Si waveguides using vertically tapered mode converters

Cited by 14 publications

References 0 publications

Reducing the temperature sensitivity of SOI waveguide-based biosensors

Reducing the temperature sensitivity of SOI waveguide-based biosensors

A grating-based coupler for fiber-to-silicon waveguide excitation

Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application

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