Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography

Moon, Jun Hyuk; Yang, Shu

doi:10.1080/15321790500304163

Cited by 43 publications

(5 citation statements)

References 98 publications

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“…The dimensionality of the generated periodic structures depends on the number of beams [ 83 ]. When the number of interfering beams,

, is below 4 and the difference of each wave vector is non-coplanar, the interference shows an

dimensional intensity grating.…”

Section: Optical Methodsmentioning

confidence: 99%

“…For the experiment, the distribution of the intensity is recorded on a photoresist layer, and then after development the structures can be transferred onto a certain substrate through a sequent process. The dimensionality of the generated periodic structures depends on the number of beams [83]. When the number of interfering beams, N, is below 4 and the difference of each wave vector is non-coplanar, the interference shows an (N − 1) dimensional intensity grating.…”

Section: Optics-based Ilmentioning

confidence: 99%

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Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.

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“…The dimensionality of the generated periodic structures depends on the number of beams [ 83 ]. When the number of interfering beams,

, is below 4 and the difference of each wave vector is non-coplanar, the interference shows an

dimensional intensity grating.…”

Section: Optical Methodsmentioning

confidence: 99%

Section: Optics-based Ilmentioning

confidence: 99%

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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show abstract

“…3D microstructures have varied application in the field of photonic crystals, biomimetic structures, optical communication, tissue engineering, etc. ,,− Nowadays, there is a growing demand for three-dimensional (3D), in vitro biological tissue models . These models are needed for fundamental investigations.…”

Section: Interference Lithography For Periodic Structuresmentioning

confidence: 99%

Femtosecond-Laser-Based 3D Printing for Tissue Engineering and Cell Biology Applications

Mishra

et al. 2017

ACS Biomater. Sci. Eng.

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Fabrication of 3D cell scaffolds has gained tremendous attention in recent years because of its applications in tissue engineering and cell biology applications. The success of tissue engineering or cell interactions mainly depends on the fabrication of well-defined microstructures, which ought to be biocompatible for cell proliferation. Femtosecond-laser-based 3D printing is one of the solution candidates that can be used to manufacture 3D tissue scaffolds through computer-aided design (CAD) which can be efficiently engineered to mimic the microenvironment of tissues. UV-based lithography has also been used for constructing the cellular scaffolds but the toxicity of UV light to the cells has prevented its application to the direct patterning of the cells in the scaffold. Although the mask-based lithography has provided a high resolution, it has only enabled 2D patterning not arbitrary 3D printing with design flexibility. Femtosecond-laser-based 3D printing is trending in the area of tissue engineering and cell biology applications due to the formation of well-defined micro- and submicrometer structures via visible and near-infrared (NIR) femtosecond laser pulses, followed by the fabrication of cell scaffold microstructures with a high precision. Laser direct writing and multiphoton polymerization are being used for fabricating the cell scaffolds, The implication of spatial light modulators in the interference lithography to generate the digital hologram will be the future prospective of mask-based lithography. Polyethylene glycol diacrylate (PEG-DA), ormocomp, pentaerythritol tetraacrylate (PETTA) have been fabricated through TPP to generate the cell scaffolds, whereas SU-8 was used to fabricate the microrobots for targeted drug delivery. Well-designed and precisely fabricated 3D cell scaffolds manufactured by femtosecond-laser-based 3D printing can be potentially used for studying cell migration, matrix invasion and nuclear stiffness to determine stage of cancer and will open broader horizons in the future in tissue engineering and biology applications.

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“…Meantime, metal anodization processes, i.e., anodized aluminum oxide (AAO) and anodized titanium oxide (ATO) processes, are used for large-area nanopore templates [11][12][13][14], but their array patterns tend to contain locally disordered portions, which would limit their usage for electronic memory devices or photonic devices requiring perfectly ordered arrays over a large area. Multibeam interference lithography (MIL), however, could be a good candidate for the patterning of perfectly ordered large-area photonic crystals and can be applied for photonic, electronic applications [15][16][17][18][19]. MIL can form interference patterns on photosensitive polymer.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Large Area, Ordered Nanoporous Structures on Various Substrates for Potential Electro-Optic Applications

et al. 2021

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Nanoporous structures have attracted great attention in electronics, sensor and storage devices, and photonics because of their large surface area, large volume to surface ratio, and potential for high-sensitivity sensor applications. Normally, electron or ion beam patterning can be used for nanopores fabrication by direct writing. However, direct writing is a rather expensive and time-consuming method due to its serial nature. Therefore, it may not translate to a preferred manufacturing process. In this research, a perfectly ordered large-area periodic pattern in an area of approximately 1 cm2 has been successfully fabricated on various substrates including glass, silicon, and polydimethylsiloxane, using a two-step process comprising visible light-based multibeam interference lithography and subsequent pattern transfer processes of reactive ion etching and nanomolding. Additionally, the multibeam interference lithography templated anodized aluminum oxide process has been described. Since the fabrication area in multibeam interference lithography can be extended by using a larger beam size, it is highly cost effective and manufacturable. Furthermore, although not described here, an electrodeposition process can be utilized as a pattern transfer process. This large-area perfectly ordered nanopore array will be very useful for high-density electronic memory and photonic bandgap and metamaterial applications.

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Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography

Cited by 43 publications

References 98 publications

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Femtosecond-Laser-Based 3D Printing for Tissue Engineering and Cell Biology Applications

Fabrication of Large Area, Ordered Nanoporous Structures on Various Substrates for Potential Electro-Optic Applications

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