2009
DOI: 10.1016/j.sna.2009.08.020
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Creep behavior of undoped and La–Nb codoped PZT based micro-piezoactuators for micro-optical modulator applications

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Cited by 19 publications
(5 citation statements)
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“…Figure 5b shows a rounding of the Lissajous figure at higher frequency. We attribute this variation to changes in the dielectric constant of PZT with temperature [51][52][53][54][55][56] that would be particularly important at the highest frequency of 5 kHz, when the temperature of the reactor walls reached 70ºC under steady state conditions (effects of the frequency itself on the dielectric constant are negligible [52,57,58]). Similar changes in the shape of the Lissajous curve have been previously reported by other authors and attributed to modifications in the resistive or capacitive behaviour of the reactor [56,59].…”
Section: 3electrical Characterizationmentioning
confidence: 99%
“…Figure 5b shows a rounding of the Lissajous figure at higher frequency. We attribute this variation to changes in the dielectric constant of PZT with temperature [51][52][53][54][55][56] that would be particularly important at the highest frequency of 5 kHz, when the temperature of the reactor walls reached 70ºC under steady state conditions (effects of the frequency itself on the dielectric constant are negligible [52,57,58]). Similar changes in the shape of the Lissajous curve have been previously reported by other authors and attributed to modifications in the resistive or capacitive behaviour of the reactor [56,59].…”
Section: 3electrical Characterizationmentioning
confidence: 99%
“…Piezoelectric thin films have attracted much interest owing to their excellent potential use in several applications, such as micro-electro-mechanical systems (MEMS), 1,2) because lead-free piezoelectric thin films are very promising for avoiding the toxicity of lead-based compounds. Therefore, many researchers have proposed lead-free materials with high piezoelectric property.…”
Section: Introductionmentioning
confidence: 99%
“…Prior to fatigue treatment, both poled and depoled states showed the same tendency, namely a gradual logarithmic reduction in the displacement with time, which is similar to the conventional creep phenomenon. The creep is thought to originate from the slow switching of the non-180 • domains under a constant dc voltage [25,26]. In that case, the applied electric field is the driving force.…”
Section: Retentionmentioning
confidence: 99%