1998
DOI: 10.1088/0957-0233/9/3/023
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Critical analysis of weighting functions for the deep level transient spectroscopy of semiconductors

Abstract: More than 20 weighting functions proposed for DLTS are critically compared. It is shown that the variety of DLTS peak widths of different weighting functions was primarily due to the variety of shapes of the high-temperature side of the peak. A refinement of the classification scheme of the weighting functions is proposed. It is shown that the high-temperature side of the DLTS peak can be made independent of the weighting function, by considering the delay time between the end of the filling pulse and the beg… Show more

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Cited by 25 publications
(15 citation statements)
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“…Filling pulses with an amplitude of 2 V to 4 V and a duration of 50 ms were employed. The DLTS signal was extracted from the acquired capacitanceversus-time transients using a lock-in weighting function 51 with six different rate windows in the range of (20 ms) À1 to (640 ms) À1 . A delay time of 5 ms and a temperature resolution of 1 K were used.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Filling pulses with an amplitude of 2 V to 4 V and a duration of 50 ms were employed. The DLTS signal was extracted from the acquired capacitanceversus-time transients using a lock-in weighting function 51 with six different rate windows in the range of (20 ms) À1 to (640 ms) À1 . A delay time of 5 ms and a temperature resolution of 1 K were used.…”
Section: Methodsmentioning
confidence: 99%
“…Here, DC is determined from the measured capacitance transients, 43,51,54 while C rb is the capacitance measured at the quiescent reverse bias voltage. N D is derived from CV measurements.…”
Section: A Thermal Admittance Spectroscopymentioning
confidence: 99%
“…The GS4 weighting function was first suggested by Istratov in 1997 and derived by Stehfest-Gaver algorithm. [17,18] It gives better energy resolution with higher capability of separating the peaks but has a poorer signal-to-noise ratio. The GS4 weighting function is given as A difference between lock-in and GS4 is shown in Fig 3.5.…”
Section: Weighting Functionsmentioning
confidence: 99%
“…The transients were normalized to the respective equilibrium capacitance. Afterwards, they have been evaluated using the double-boxcar weighting function, in order to obtain the usual DLTS signal versus temperature graphs [10].…”
Section: Bereitgestellt Von | Technische Informationsbibliothek Hannovermentioning
confidence: 99%