Cross-coupling of the oscillation modes of vibratory gyroscopes

Abstract

This paper reports for the first time on the results of the advanced gyroscope design of HSG-IMIT with the double decoupling mechanism. In connection with the measurement results, particularly to characterize the effectiveness of the decoupling, the cross-coupling of the driven oscillation and the detection oscillation is investigated, discussed and evaluated in detail by theoretical modeling. A description of the measurement signal and the so-called quadrature signal is deduced and a comparison with the gyroscopes of HSG-IMIT realized according to the single decoupling principle DAVED [I] is accomplished.

A dynamical envelope model for vibratory gyroscopes

“…Most capacitive gyroscopes found in the literature are driven by electrostatic comb actuators bringing about the advantage of a high actuation force and little required space. They are found in linear oscillating as well as in rotating designs, see, e.g., Alper and Akin (2001), Bhave et al (2003), Braxmaier et al (2003), Piyabongkarn et al (2005), Seshia et al (2002) and Juneau et al (1997), respectively. For the same reason the read-out of the secondary oscillation is preferably also realized by means of comb sensors.…”

“…For the same reason the read-out of the secondary oscillation is preferably also realized by means of comb sensors. Obviously, comb sensors require the secondary mode to be also an in-plane oscillation as it is the case for the designs presented by Alper and Akin (2001), Braxmaier et al (2003), Piyabongkarn et al (2005) and Seshia et al (2002). If the secondary mode is an out-ofplane oscillation, parallel plate capacitors are utilized such that the movable electrode is part of the oscillating structure and the appropriate fixed electrode is mounted on the housing of the device, see, e.g., Günthner (2006).…”

On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices

“…In reality, there are several mechanisms, which cause error to the secondary signal amplitude [8]. One of these is the signal that results from coupling of primary resonator vibration to the secondary resonator due to misalignment between the two resonators.…”

Cross-Coupling Errors of Micromachined Gyroscopes

“…That is, they ignored the remaining dynamic coupling due to a general substrate motion. However, these cross-couplings may produce an undesirable sense signal, called quadrature error, even in the absence of manufacturing imperfections [3]. 1 To this end, the elastic couplings that occur in the suspension beams of rotary gyroscopes have been studied extensively in [4]- [6].…”