“…Nitrides Nitrides are another class of nitrogen-containing compounds based on metal-nitrogen bonds. Examples include boron nitride, [37][38][39][40] carbon nitride, [41][42][43][44][45] silicon nitride, 46) gallium nitride, [47][48][49][50][51][52][53] indium nitride, 54) aluminum nitride, iron nitride, titanium nitride, tantalum nitride, tungsten nitride and hafnium nitride. Methods for the deposition of atomic layers of these compounds are listed in Ref.…”