2022
DOI: 10.3390/nano12213890
|View full text |Cite
|
Sign up to set email alerts
|

Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures

Abstract: Hafnium oxide (HfO2) thin film has remarkable physical and chemical properties, which makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon through plasma enhanced atomic layer deposition (PEALD) at various substrate temperatures. The growth per cycle, structural, morphology and crystalline properties of HfO2 films were measured by spectroscopic ellipsometer, grazing-incidence X-ray diffraction (GIXRD), X-ray reflectivity (XRR), field-emission scanning electron micros… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
0
0

Year Published

2023
2023
2025
2025

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 13 publications
(2 citation statements)
references
References 52 publications
(56 reference statements)
0
0
0
Order By: Relevance
“…32,33 The change of structure is observed at 250–300 °C. This is consistent with previous reports 34,35 in which transitions to a crystalline structure at elevated temperatures have been observed for amorphous HfO 2 and ZrO 2 on a crystalline substrate. EDS analysis indicates that the samples are still oxidized, even after annealing in H 2 .…”
Section: Resultssupporting
confidence: 94%
See 1 more Smart Citation
“…32,33 The change of structure is observed at 250–300 °C. This is consistent with previous reports 34,35 in which transitions to a crystalline structure at elevated temperatures have been observed for amorphous HfO 2 and ZrO 2 on a crystalline substrate. EDS analysis indicates that the samples are still oxidized, even after annealing in H 2 .…”
Section: Resultssupporting
confidence: 94%
“…The amorphous oxide can be crystallized after annealing. 35 No cavities were observed, and EDS analysis shows a uniform composition (Fig. S14 and S15, ESI†).…”
Section: Resultsmentioning
confidence: 99%