“…From the fitting results, we can see that the E a-GaOx g value slightly increased from 5.2 ± 0.01 to 5.32 ± 0.01 eV with the increasement of oxygen flux, and the higher E a-GaOx g values measured for the a-GaO x films may be due to the amorphous nature of the films and the fewer oxygen vacancies. In other words, the excess oxygen introduced during the fabrication fills the defects and reduces the disorder of the amorphous film, resulting in a reduction in the donor levels below the conduction band minimum, which allows the bandgap to increase [23,27,28]. Meanwhile, the bandgap of ITO, E ITO g , was fitted as 3.96 ± 0.005 eV, which is similar to the reported value [29].…”