The prospect of micro/nano technology requires the development of advanced production processes which joins them into complex systems to interact with the macro world. This has led to the evolution of micro welding. During the micro welding process, the flow of heat needs to be checked so that the essential mechanical and electrical properties of the material are not lost. Also, the amount of melting and excess evaporation has to be controlled. These can be attained by welding using localized heat sources. In the present work, electron beam micro welding process is studied and heat transfer analysis has been carried out numerically, to obtain the temperature distribution in the material. For a specified depth of melting, the effect of Peclet number on the welding process is investigated. The study shows that the high Peclet number electron beam micro welding process provides two important advantages — Control of the maximum temperature on the surface which prevents excess material loss, and limited heat transfer under the beam.