Dynamics Compensation and Rapid Resonance Identification in Ultrasonic-Vibration-Assisted Microforming System Using Magnetostrictive Actuator

Wang, Zhihua; Zou, Qingze; Faidley, LeAnn E.; Kim, Gap-Yong

doi:10.1109/tmech.2011.2116032

Cited by 20 publications

(3 citation statements)

References 26 publications

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“…About vibrations suppression, another application is related to the improvement of performances for tooling machines [106], such as for lathes [207] or boring bars [208]. One of the first applications of MA is in sonar systems, as for an ultrasonic-vibration-assisted microforming system [209], or to develop a guided wave generation system for nondestructive tests [210]. In [11], several applications are reported, such as a Tripode Tonpilz-type sonar transducer that is one of the first and most successful applications of MA to show their high power capabilities.…”

Section: Applicationsmentioning

confidence: 99%

Review of Modeling and Control of Magnetostrictive Actuators

et al. 2019

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Magnetostrictive actuators play an important role in the perception of usefulness of smart materials and devices. Their applications are potentially wider than that of piezoelectric actuators because of the higher energy density and intrinsic robustness. However, the non-negligible hysteresis and complexity of their characteristics make the design and control quite difficult and has limited their diffusion in industrial applications. Nevertheless, the scientific literature presents a wide offer of results in design and geometries, modeling and control that may be exploited for applications. This paper gives a reasoned review of the main results achieved in the literature about design, modeling and control of magnetostrictive actuators exploiting the direct effects of magnetostriction (Joule and Wiedemann). Some perspectives and challenges about magnetostrictive actuators development are also gathered.

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Section: Applicationsmentioning

confidence: 99%

Review of Modeling and Control of Magnetostrictive Actuators

et al. 2019

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“…For example, direct patterning on tungsten coated mask presented in this work demonstrated the feasibility of the proposed technique for mask lithography: Not only both the patterning speed and pattern quality (line width) compare well with those obtained using electronic beam (E-beam) lithography, but also the proposed technique avoids the step to generate pattern on polymer layer first as needed in the E-beam lithography. 18 We also note that ultrasonic vibration has been explored at macro-and mesoscale machining, 19 and has also been recently employed in mechanical plowing PBN. 5 However, unlike the work in Ref.…”

Section: Introductionmentioning

confidence: 99%

Mechanical-plowing-based high-speed patterning on hard material via advanced-control and ultrasonic probe vibration

Wang

Tan²,

Zou³

et al. 2013

Review of Scientific Instruments

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In this paper, we present a high-speed direct pattern fabrication on hard materials (e.g., a tungsten-coated quartz substrate) via mechanical plowing. Compared to other probe-based nanolithography techniques based on chemical- and/or physical-reactions (e.g., the Dip-pen technique), mechanical plowing is meritorious for its low cost, ease of process control, and capability of working with a wide variety of materials beyond conductive and/or soft materials. However, direct patterning on hard material faces two daunting challenges. First, the patterning throughput is ultimately hindered by the "writing" (plowing) speed, which, in turn, is limited by the adverse effects that can be excited/induced during high-speed, and/or large-range plowing, including the vibrational dynamics of the actuation system (the piezoelectric actuator, the cantilever, and the mechanical fixture connecting the cantilever to the actuator), the dynamic cross-axis coupling between different axes of motion, and the hysteresis and the drift effects related to the piezoelectric actuators. Secondly, it is very challenging to directly pattern on ultra-hard materials via plowing. Even with a diamond probe, the line depth of the pattern via continuous plowing on ultra-hard materials such as tungsten, is still rather small (<0.5 nm), particularly when the "writing" speed becomes high. To overcome these two challenges, we propose to utilize a novel iterative learning control technique to achieve precision tracking of the desired pattern during high-speed, large-range plowing, and introduce ultrasonic vibration of the probe in the normal (vertical) direction during the plowing process to enable direct patterning on ultra hard materials. The proposed approach was implemented to directly fabricate patterns on a mask with tungsten coating and quartz substrate. The experimental results demonstrated that a large-size pattern of four grooves (20 μm in length with 300 nm spacing between lines) can be fabricated at a high speed of ~5 mm/s, with the line width and the line depth at ~95 nm and 2 nm, respectively. A fine pattern of the word "NANO" is also fabricated at the speed of ~5 mm/s.

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“…The earliest application of GMM was underwater acoustic sonars, which have shown excellent performance. Nowadays, this kind of material has been widely used in the fields of machinery, electronics, petroleum, textile, medical treatment, precision control, and especially ultrasonic applications [19,20,21,22,23,24]. In this study, a miniaturized resonant thrombus dredger is developed, which is driven by GMM bulk-extensional magneto-elastic actuation under an external magnetic field.…”

Section: Introductionmentioning

confidence: 99%

Magneto-Elastic μ-Vibrator for Smashing Thrombus

Xue

2019

Micromachines

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A miniaturized thrombus dredger is proposed and developed in this study. The flexural resonance of the µ-resonator dredger is driven by a bulk-extensional magneto-elastic vibrator that is externally excited by alternating magnetic-field. With the fabricated prototype of the resonant dredger, a mice thrombus blocked in a simulated vessel is broken into micro-pieces, and the previously blocked vessel can recover to an unobstructed state within 1 h. A flow-rate ratio detection method is used to evaluate the thrombus-cleaning effectiveness. The comparison between the finite-element simulation and the experimental results validates the flow-rate ratio detection method. By optimally exciting the resonant dredger in its third resonant mode, the flow-rate ratio in the cleaned vessel increases by about 2.7 times compared with that in the partly blocked vessel, and the thrombus is smashed into micro-pieces.

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Dynamics Compensation and Rapid Resonance Identification in Ultrasonic-Vibration-Assisted Microforming System Using Magnetostrictive Actuator

Cited by 20 publications

References 26 publications

Review of Modeling and Control of Magnetostrictive Actuators

Review of Modeling and Control of Magnetostrictive Actuators

Mechanical-plowing-based high-speed patterning on hard material via advanced-control and ultrasonic probe vibration

Magneto-Elastic μ-Vibrator for Smashing Thrombus

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