Current status of the 6 m low-energy spherical grating monochromator beamline at SRRC

Tseng, P. C.; Lin, Hong Ji; Chung, S. C.; Chen, C. I.; Lin, H. F.; Dann, T. E.; Song, Yen‐Fang; Hsieh, Tacheng; Tsang, K. L.; Chang, Chao‐Wan

doi:10.1063/1.1145874

Cited by 8 publications

(2 citation statements)

References 13 publications

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“…The SR white beam has a photon energy distribution from ∼20 to ∼200 eV. The beamline is described in detail elsewhere . The temperature increase, as monitored by a thermocouple, in the substrate during SR irradiation is negligible.…”

Section: Methodsmentioning

confidence: 99%

Low-Temperature Chlorination of GaAs(100)

Hung

Chang

1998

J. Phys. Chem. B

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The chemisorption and the reaction of chlorine and hydrogen chloride on the GaAs(100)-4 × 6 surface at 110 K are investigated using soft X-ray photoelectron spectroscopy which employs synchrotron radiation. At low exposures, Cl 2 and HCl dissociate and preferentially adsorb on the As atom, which causes As-Ga bond breakage to initiate chlorination of the Ga atom. As x Cl is proposed to form at initial chlorination, in which the Cl atom is bonded to a high coordination site. Subsequently, various AsCl x and GaCl x (x ) 1, 2, and 3) species are formed on the GaAs surface, and their corresponding chemical shifts are assigned. At high exposures, chlorination of the GaAs surface is saturated, and the surface is mainly covered with physisorbed Cl 2 and HCl molecules. Synchrotron radiation on the chlorinated GaAs surface stimulates both the photodesorption of Ga and As chlorides and the photodissociation of physisorbed Cl 2 molecules. A potential route for anisotropic cryogenic etching of the GaAs surface by the chlorine-containing compound under photon irradiation is discussed.

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Section: Methodsmentioning

confidence: 99%

Low-Temperature Chlorination of GaAs(100)

Hung

Chang

1998

J. Phys. Chem. B

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“…In 1994 the first beamline of Taiwan Light Source (TLS) was installed (BL08A; Tseng et al, 1995). A photon-BPM (former position indicated in Fig.…”

Section: Introductionmentioning

confidence: 99%

Upgrade of beamline BL08B at Taiwan Light Source from a photon-BPM to a double-grating SGM beamline

Yuh

Lin

Liang

et al. 2015

J Synchrotron Radiat

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During the last 20 years, beamline BL08B has been upgraded step by step from a photon beam-position monitor (BPM) to a testing beamline and a single-grating beamline that enables experiments to record X-ray photo-emission spectra (XPS) and X-ray absorption spectra (XAS) for research in solar physics, organic semiconductor materials and spinel oxides, with soft X-ray photon energies in the range 300-1000 eV. Demands for photon energy to extend to the extreme ultraviolet region for applications in nano-fabrication and topological thin films are increasing. The basic spherical-grating monochromator beamline was again upgraded by adding a second grating that delivers photons of energy from 80 to 420 eV. Four end-stations were designed for experiments with XPS, XAS, interstellar photoprocess systems (IPS) and extreme-ultraviolet lithography (EUVL) in the scheduled beam time. The data from these experiments show a large count rate in core levels probed and excellent statistics on background normalization in the L-edge adsorption spectrum.

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Ionic outgassing from photoacid generators upon irradiation at 13.5nm

Liu

Yen

et al. 2008

Microelectronic Engineering

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Current status of the 6 m low-energy spherical grating monochromator beamline at SRRC

Cited by 8 publications

References 13 publications

Low-Temperature Chlorination of GaAs(100)

Low-Temperature Chlorination of GaAs(100)

Upgrade of beamline BL08B at Taiwan Light Source from a photon-BPM to a double-grating SGM beamline

Ionic outgassing from photoacid generators upon irradiation at 13.5nm

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