High-quality barium strontium titanate ͑BST͒ thin films were fabricated using charged liquid cluster beam ͑CLCB͒ method. The X-ray diffraction patterns of the as-deposited BST films indicated that the perovskite phase appeared at 450°C without any intermediate phase and high film crystallinity was achieved at 500°C. The Ba:Sr:Ti ratio in the precursor solution was transferred to the deposited film without any loss. The crystallinity, dielectric constant, dissipation factor, and leakage current density were measured and compared for the as-deposited films prepared at 500°C and the films deposited at 400°C and postannealed at 700°C. © 2004 The Electrochemical Society. ͓DOI: 10.1149/1.1809551͔ All rights reserved. Barium strontium titanate ͑BST͒ thin films have attracted much attention due to their potential applications in the dynamic random access memory ͑DRAM͒ and tunable microwave devices, which derive from their high dielectric constant, low leakage current density, and low dielectric loss and high tunability at room temperature.1-5 Chemical vapor deposition ͑CVD͒ has been known as the most promising method for fabricating high-quality BST films for DRAM devices where conformal coverage over complex topography is required.6-11 A key to a successful CVD process is the availability of suitable precursors with sufficient volatility and stability. However, developing such precursors for BST films has been challenging due to the low volatility of the barium and strontium compounds stemming from their tendency to oligomerize. Thus, the control on film stoichiometry is, in general, problematic. In addition, the films deposited by CVD require high-temperature post-annealing processes under O 2 ambience to obtain perovskite phase, which would cause the oxidation of poly-silicon at the interface of ULSI.12-14 With sol-gel processing or chemical solution deposition methods, which require no precursor volatility, the control of film stoichiometry is facile. [15][16][17][18][19][20][21][22][23][24] However, in these cases the formation of intermediate phase has been commonly observed and hightemperature postannealing processes are required to obtain perovskite phase. Besides, problems such as cracks in the deposited films and low throughput arise when the precursor materials are applied onto the substrates using conventional spin-coating technique.Herein, we report the growth of BST thin films by the charged liquid cluster beam ͑CLCB͒ method in an effort to circumvent the problems in the above-mentioned chemical processes. The deposited BST films exhibited smooth and dense surface morphology with good electrical properties. The Ba:Sr:Ti ratio in the precursor solution was preserved in the deposited films.The CLCB method is a novel thin-film deposition method in which flow-limited field-injection electrostatic spraying ͑FFESS͒ is invoked to produce charged nanodrops of a precursor solution. 25,26 These charged nanodrops are subsequently accelerated toward a heated substrate for film deposition. Detailed descriptions of the ...