Curvy surface conformal ultra-thin transfer printed Si optoelectronic penetrating microprobe arrays

Sim, Kyoseung; Li, Yanbin; Yang, Dong; Yu, Cunjiang

doi:10.1038/s41528-017-0015-8

Cited by 24 publications

(16 citation statements)

References 37 publications

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“…Numerous recording and stimulation mechanisms in injectable formats exist to extract important data from and to treat diseases in the brain 51,95–101. The most mature technology for recording and stimulating the brain is conducting metal electrodes, owing to their superior biocompatibility, manufacturing easiness, and electrical characteristics 39,102.…”

Section: Injectable Systems For the Brainmentioning

confidence: 99%

“…Microelectromechanical systems were also implemented into these wafer‐based injectable biomedical devices to create complex 3D geometries, such as fluidic channels and optical waveguides 49,50. More recently, the ability to fabricate such advanced devices on polymeric substrates created a low‐cost and thinner form of needles for mechanically compliant operation inside the body 46,51. Simultaneous operation of different sensor types as well as simulation tools could be realized via transfer printing various devices onto the polymeric needle tip 27,45,52.…”

Section: Introductionmentioning

confidence: 99%

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Injectable Biomedical Devices for Sensing and Stimulating Internal Body Organs

et al. 2020

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The rapid pace of progress in implantable electronics driven by novel technology has created devices with unconventional designs and features to reduce invasiveness and establish new sensing and stimulating techniques. Among the designs, injectable forms of biomedical electronics are explored for accurate and safe targeting of deep‐seated body organs. Here, the classes of biomedical electronics and tools that have high aspect ratio structures designed to be injected or inserted into internal organs for minimally invasive monitoring and therapy are reviewed. Compared with devices in bulky or planar formats, the long shaft‐like forms of implantable devices are easily placed in the organs with minimized outward protrusions via injection or insertion processes. Adding flexibility to the devices also enables effortless insertions through complex biological cavities, such as the cochlea, and enhances chronic reliability by complying with natural body movements, such as the heartbeat. Diverse types of such injectable implants developed for different organs are reviewed and the electronic, optoelectronic, piezoelectric, and microfluidic devices that enable stimulations and measurements of site‐specific regions in the body are discussed. Noninvasive penetration strategies to deliver the miniscule devices are also considered. Finally, the challenges and future directions associated with deep body biomedical electronics are explained.

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Section: Injectable Systems For the Brainmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Injectable Biomedical Devices for Sensing and Stimulating Internal Body Organs

et al. 2020

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“…Flexible polymer-based foldable arrays have been developed to address this issue, in which a non-planar structure could be created by folding some parts of the thin-film array by means of magnetic force [ 153 , 154 ], electrostatic force [ 151 ], or origami-like manipulation [ 152 ]. These types of folded probes can offer three-dimensional recordings of brain activity in both horizontal and vertical directions, yet with a high degree of flexibility conforming to the curvature or movement of the brain tissue.…”

Section: Non-conventional Neural Probesmentioning

confidence: 99%

“…Various research groups have addressed these issues by introducing unique features which are added to conventional shank-type cortical arrays through specially devised microfabrication techniques. As illustrated in Figure 1B, these efforts have resulted in a variety of microelectrode arrays featuring various non-conventional characteristics, including: (1) multi-sided arrays to avoid shielding and increase the recording volume [132,133,134,135,136,137,138,139,140,141]; (2) tube-type or cylindrical probes for three-dimensional (3D) recording, deep insertion and multi-modality capabilities [142,143,144,145,146,147,148,149,150]; (3) folded arrays for high conformability and 3D recording [151,152,153,154]; (4) self-softening or self-deployable probes for minimized tissue damage and an extension of the recording site beyond the gliosis [155,156,157,158,159,160,161,162,163,164,165,166,167,168]; (5) mesh- or thread-like arrays to minimize glial scarring and immune response levels [169,170,171,172,173,174,175,176,177,178,179,180,181]; (6) nanostructured probes to reduce the immune response [182,183,184,…”

Section: Introductionmentioning

confidence: 99%

Recent Progress on Non-Conventional Microfabricated Probes for the Chronic Recording of Cortical Neural Activity

Kim

Jeong

Kim

2019

Sensors

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Microfabrication technology for cortical interfaces has advanced rapidly over the past few decades for electrophysiological studies and neuroprosthetic devices offering the precise recording and stimulation of neural activity in the cortex. While various cortical microelectrode arrays have been extensively and successfully demonstrated in animal and clinical studies, there remains room for further improvement of the probe structure, materials, and fabrication technology, particularly for high-fidelity recording in chronic implantation. A variety of non-conventional probes featuring unique characteristics in their designs, materials and fabrication methods have been proposed to address the limitations of the conventional standard shank-type (“Utah-” or “Michigan-” type) devices. Such non-conventional probes include multi-sided arrays to avoid shielding and increase recording volumes, mesh- or thread-like arrays for minimized glial scarring and immune response, tube-type or cylindrical probes for three-dimensional (3D) recording and multi-modality, folded arrays for high conformability and 3D recording, self-softening or self-deployable probes for minimized tissue damage and extensions of the recording sites beyond gliosis, nanostructured probes to reduce the immune response, and cone-shaped electrodes for promoting tissue ingrowth and long-term recording stability. Herein, the recent progress with reference to the many different types of non-conventional arrays is reviewed while highlighting the challenges to be addressed and the microfabrication techniques necessary to implement such features.

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“…The devices were fabricated based on an SOI wafer (lightly p‐doped) by doping (n‐type), top down patterning, and then transfer printed onto a prestretched elastomer substrate. The detailed fabrication process is described in the Experimental Section and elsewhere . Figure a shows an optical microscopic image of the single Si photodetectors after fully releasing the prestrain on the elastomeric substrate.…”

mentioning

confidence: 99%

Biaxially Stretchable Ultrathin Si Enabled by Serpentine Structures on Prestrained Elastomers

Sim

Song

et al. 2018

Adv Materials Technologies

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most of the materials' intrinsic fracture limit. [1][2][3][4][5] Realized through the combinations of materials, device layouts, and mechanical structure designs, stretchable electronics have a broad range of applications in areas ranging from wearable photo voltaics, to personal health monitors, to sensitive robotic skin prosthetics, to soft surgical tools, and to electronic "eyeball" imaging devices. [6][7][8][9][10] In all of these cases, mechanical stretchability is a key, enabling characteristic. Recent advances in material design and synthesis have led to many stretchable polymeric functional materials such as conductors, [11][12][13] semiconductors, [14,15] mechanophores, [16,17] etc., which provide immediate outlets to stretchable electronics. [13][14][15]18] In particular, from the perspective of electronics performance, among all kinds of stretchable electronics, those employing inorganic materials are especially attractive since they are able to offer a high profile of device performance besides their mechanical merits for applications such as biomedical instruments, where high performance is required.To date, many studies have reported on developing stretchable inorganic semiconductors from materials, such as Si, which are intrinscally brittle. One prevalent strategy is the prestrain strategy, in which very thin stiff films are first bonded or deposited on a prestretched elastomer substrate and then the prestrain on the elastomer is released resulting in simultaneously generated surface microstructures. The prestrain strategy has been successfully adopted to generate stretchable Si-based electronics, which represents a way of exploiting out-of-plane deformation to induce stretchability. [19][20][21][22][23][24][25][26][27] In this case, the stretchability is limited to the prestrain applied on the elastomer substrate; the thin films become flattened when stretched at the same extent of the prestrain, and further stretching will induce fracture. In addition, most of the reported devices were generated by uniaxial prestrains on materials in the configuration of thin films, ribbons, or wires. [19][20][21][22][23][24] Thin films bonded with prestretched elastomer substrate along biaxes give rise to undefined surface topographies depending upon the orders of the prestrain relaxation.The other widely adopted strategy, which lies in constructing devices in the configuration of thin serpentine interconnects with island shaped Si functional electronics, has been explored for stretchable electronics, where in-plane geometries of the thin serpentine wires enable stretchability. [28][29][30] In this case, the stretchability simply depends on the ratio of contour length Building stretchable electronics from inorganic materials is a testified pathway toward devices with high performances for many applications in fields such as optoelectronics, biomedical, etc. Owing to the unstretchable nature of these materials (e.g., brittleness of Si), existing ways to enable stretchabilities mainly involve either bonding thin f...

show abstract

Curvy surface conformal ultra-thin transfer printed Si optoelectronic penetrating microprobe arrays

Cited by 24 publications

References 37 publications

Injectable Biomedical Devices for Sensing and Stimulating Internal Body Organs

Injectable Biomedical Devices for Sensing and Stimulating Internal Body Organs

Recent Progress on Non-Conventional Microfabricated Probes for the Chronic Recording of Cortical Neural Activity

Biaxially Stretchable Ultrathin Si Enabled by Serpentine Structures on Prestrained Elastomers

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