CVD diamond films for thermal management applications

Kyatam, Shusmitha; Mendes, Joana Catarina; Mukherjee, Debarati; Silva, Armindo; Alves, Luís Nero; Rotter, Shlomo; Neto, M.A.; Oliveira, F.J.; Silva, Rui; Neto, Hugo

doi:10.1109/comcas44984.2019.8958115

Cited by 2 publications

(2 citation statements)

References 22 publications

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“…(The growth rate of diamond films deposited at 850 • C is ∼10 µm h −1 , which decreased to 500 nm h −1 for the film deposited at 300 • C.) But diamond deposition at low temperatures (<300 • C) would facilitate the direct integration of microelectronic devices with diamond, which is beneficial for better thermal management in high power electronic/optoelectronic (e.g. GaN LEDs) devices [60,61]. Despite the several advantages, the films deposited using MPCVD possess high intrinsic stress, compared to the films deposited using HFCVD.…”

Section: Microwave Plasma Cvdmentioning

confidence: 99%

Diamond—the ultimate material for exploring physics of spin-defects for quantum technologies and diamondtronics

Das¹,

Raj²,

Jana³

et al. 2022

J. Phys. D: Appl. Phys.

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Diamond due to its outstanding optical, electrical, mechanical and thermal properties finds an important place in electronic, opto-electronic and quantum technologies. Recent progresses showing superconductivity in diamond by boron doping has opened up many avenues including its applications in SQUID devices especially with polycrystalline diamond films. Granular boron doped diamond films find applications in quantum inductance devices where high surface inductance is required. Particularly important are the defect centers in diamond like nitrogen-vacancy (N-V), silicon vacancy (SiV) and other color centres which are ideal candidates for next generation quantum hardware systems. For efficient device applications, an indispensable need remains for a substitutional donor in diamond lattice that yields a lower thermal activation energy at room temperature. In this review, a comprehensive summary of research and the technological challenges has been reported including some of our latest results on nitrogen doping in polycrystalline diamond to understand the transport phenomenon emphasizing on its possible future applications.

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Section: Microwave Plasma Cvdmentioning

confidence: 99%

Diamond—the ultimate material for exploring physics of spin-defects for quantum technologies and diamondtronics

Das¹,

Raj²,

Jana³

et al. 2022

J. Phys. D: Appl. Phys.

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“…It is also an unrivaled choice as heat management device due to the very high thermal conductivity of diamond. Grown films can be placed directly over heat generating electronic devices or even diamond layers can be directly deposited over semiconducting components so the heat is promptly spread out of the hot spots 27 .…”

Section: Introductionmentioning

confidence: 99%

Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge

et al. 2022

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Among all the allotropic forms of carbon, diamond has attracted a broad scientific and technological interest for its extreme and unique properties rarely matched by other materials in nature. In a rapid rise from a technological point of view, much has been achieved in the study of obtaining this material through CVD technique. Studies of CVD diamond growth parameters of monocrystalline structure, underway in the team, are very expensive and time-consuming requiring in-depth studies of CVD diamond growth parameters of polycrystalline structure. So, this work presents an analysis focused on obtaining CVD diamond films with polycrystalline structure through the 2.45 GHz microwave plasma activation method (MWPACVD) in high power regime using a modified substrate holder to find a set of parameters appropriated for getting uniform quality and growth rate of thick films. The films were characterized using Raman scattering spectroscopy and scanning electron microscopy. The results point to optimized conditions for depositing films with growth rates of up to 20 µm/h with low levels of intrinsic stress, good structural quality and uniform microcrystalline morphology along the deposition surface.

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CVD diamond films for thermal management applications

Cited by 2 publications

References 22 publications

Diamond—the ultimate material for exploring physics of spin-defects for quantum technologies and diamondtronics

Diamond—the ultimate material for exploring physics of spin-defects for quantum technologies and diamondtronics

Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge

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