Abstract--Emerging cybersecurity vulnerabilities in supervisory control and data acquisition (SCADA) systems are becoming urgent engineering issues for modern substations. This paper proposes a novel intrusion detection system (IDS) tailored for cybersecurity of IEC 61850 based substations. The proposed IDS integrates physical knowledge, protocol specifications and logical behaviors to provide a comprehensive and effective solution that is able to mitigate various cyberattacks. The proposed approach comprises access control detection, protocol whitelisting, model-based detection, and multi-parameter based detection. This SCADA-specific IDS is implemented and validated using a comprehensive and realistic cyber-physical test-bed and data from a real 500kV smart substation.