In this study, we investigated the cytocompatibility of ceramic nanoparticles on different types of cells. All ceramics nanoparticles investigated in this study except Copper oxide (CuO) exhibited good cytocompatibility and cell viability (90% or more) even at 20 ppm concentration. In contrast, CuO nanoparticles caused cell inflammation, and their effect depended on their particle size. Confocal fluorescence microscopy measurements indicated that some particles had penetrated into the cells. These results indicate that except CuO nanoparticles, all other ceramic nanoparticles reported herein exhibited excellent cytocompatibility even for lung epithelial cells.