Calcium titanate (CaTiO 3 ) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm) 2 and Ti(O-iPr) 2 (dpm) 2 precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (R Ca/Ti ), total pressure (P tot ) and substrate temperature (T sub ). CaTiO 3 films in a single phase were obtained at the condition of R Ca/Ti ¼ 0:95, T sub ¼ 1073 K and P tot ¼ 0:8 kPa, and R Ca/Ti ¼ 0:78, T sub ¼ 973 K and P tot ¼ 0:8 kPa. The CaTiO 3 films prepared at T sub ¼ 1073 K had a welldeveloped columnar texture, and significant (010) orientation was observed at R Ca/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1:25 Â 10 À8 m s À1 at T sub ¼ 1073 K, P tot ¼ 0:4 kPa and R Ca/Ti ¼ 0:95.