In this work, we made a bulk defect-mediated absorption
(BDA) sub-bandgap
all-Si photodetector (PD) with low dark current density and high detectivity
at ambient temperatures (223–293 K). The testing wavelength
is chosen as 1319 nm. Pt layer was deposited onto the surface of black
Si, followed by annealing at 950 °C, to form a bulk defect energy
band for sub-bandgap near-infrared (NIR) absorption. The Al2O3 layer was applied to the front side of the PD as a
typical passivating layer to passivate the surface of the black Si.
The ZnO layer was applied to the rear side of the PD to block the
dark current arising from the introduced bulk defect band. The synergetic
introduction of the passivating and blocking layers reduced the dark
current significantly by 2 to 3 orders of magnitude. For the PD after
thickness optimization of passivating and blocking layers in this
work, at 293 and 223 K, the dark current densities finally achieved
were 6.0 × 10–8 and 1.6 × 10–9 A/cm2, with responsivities of 3.9 and 2.9 mA/W and specific
detectivities of 2.8 × 1010 and 1.2 × 1011 cm·(Hz)1/2/W, respectively, at a bias of
0.3 V. The all-Si NIR PD developed here would have promising applications
in cost-effective, low-light-level, NIR detection and imaging.