1 ,l -Difluorodecamethyl-and 1 ,I ,4,4-tetrafluorooctamethylcyclohexasilane were synthesized by the reaction of LiF with the corresponding trifluoromethanesulfonic derivatives and were characterized by spectroscopic methods, mainly by modern N M R techniques. The stability of the fluorinated cyclosilanes decreases with an increase of fluorine substituents. This seems to be the reason for the instability of perfluorinated cyclosilanes.