Conference Digest Conference on Precision Electromagnetic Measurements
DOI: 10.1109/cpem.2002.1034896
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DC conductivity measurements in the Van der Pauw geometry

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Cited by 5 publications
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“…Then, values were obtained by multiplying Rsh to the film thickness value which was determined as d = 106±2 nm. The degree of uncertainty is difficult to quantify, but the deviation was considered mainly due to systematic errors resulting from probes surface area and their non-ohmic contacts, which affects the relative behavior of different films in a similar way [37]. The optical transmittance T and reflectance R spectra of Group B samples after the additional heat-treatment are compared in Figure 5.…”
Section: Resultsmentioning
confidence: 99%
“…Then, values were obtained by multiplying Rsh to the film thickness value which was determined as d = 106±2 nm. The degree of uncertainty is difficult to quantify, but the deviation was considered mainly due to systematic errors resulting from probes surface area and their non-ohmic contacts, which affects the relative behavior of different films in a similar way [37]. The optical transmittance T and reflectance R spectra of Group B samples after the additional heat-treatment are compared in Figure 5.…”
Section: Resultsmentioning
confidence: 99%
“…The function 1 Q to be integrated has a dominant peak as shown in Figure 1. The width of the peak exhibits inverse dependence on the outer diameter of the coil.…”
Section: Forward Problem Solutionmentioning
confidence: 99%
“…Several calibration techniques based on DC current [1], AC current [2] and combination of both methods [3] have been developed.…”
Section: Introductionmentioning
confidence: 99%
“…The van der Pauw (VdP) structure, based upon the theoretical work of van der Pauw (Pauw, 1958), is a test structure widely used for measuring resistivity of arbitrary shaped samples of constant thickness. Over the years, many researchers have extended the original ideas to develop a variety of approaches for evaluating the resistivities of both isotropic an anisoptropic materials using the VdP type structures (Futamata, 1992;Ramadan, 1994;Gelder, 1995;Rietveld, 2003).…”
Section: Introductionmentioning
confidence: 99%