DC-plasma-assisted synthesis of diamond and alumina using liquid

Suzuki, Takayoshi; Ishihara, Toshihiko; Shimosato, Tomonori; Yamazaki, Tsutomu; Wada, Satoshi

doi:10.1016/s0955-2219(97)00110-6

Cited by 10 publications

(4 citation statements)

References 6 publications

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“…[1][2][3] However, it is difficult to control the physical properties and the characteristics of the discharge using this method. There is also the drawback that a substrate may be damaged by the thermal plasma.…”

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confidence: 99%

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Discharge Characteristics of Microwave and High-Frequency In-Liquid Plasma in Water

Nomura¹,

Toyota²,

Mukasa³

et al. 2008

Appl. Phys. Express

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The plasma in water is generated by applying high-frequency (HF) irradiation of 27.12 MHz or microwave (MW) radiation of 2.45 GHz from an electrode. The electrode is heated by joule heating by the HF or MW irradiation, and vapor bubbles are generated simultaneously. The plasma is then ignited inside the bubbles on the electrode. The glow discharge plasma can be maintained in spite of atmospheric pressure due to the cooling effect of the liquid itself. The electron temperature of the plasma generated by the 27.12 MHz radiation is higher than that generated by the 2.45 GHz radiation. #

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mentioning

confidence: 99%

“…ielectric breakdown by arc discharge has been well known for many years as a method for generating plasma in a liquid. [1][2][3] However, it is difficult to control the physical properties and the characteristics of the discharge using this method. There is also the drawback that a substrate may be damaged by the thermal plasma.…”

mentioning

confidence: 99%

Discharge Characteristics of Microwave and High-Frequency In-Liquid Plasma in Water

Nomura¹,

Toyota²,

Mukasa³

et al. 2008

Appl. Phys. Express

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“…Diamonds have many exceptional properties, such as extreme hardness, high thermal conductivity, high optical transmittance, wide band gap, low electron work function, high chemical stability, and so on. , Therefore, diamond films have potential applications in many fields such as hard surface coatings, flat panel displays, detectors and sensors, optical windows, surface acoustic wave (SAW) devices, electrochemical electrodes, and so forth. − In previous reports, diamond films have typically been synthesized by hot filament, direct current plasma, and microwave plasma chemical vapor deposition methods, and the used gas is mainly CH 4 /H 2 gas mixture for microcrystalline diamonds and CH 4 /H 2 or CH 4 /Ar/H 2 gas mixture for nanocrystalline diamonds. − Furthermore, diamond nanowires and nanorods have been prepared by microprocess technology, etching of diamond films or carbon nanotubes. − It is generally agreed that the properties of diamond films, such as morphology, microstructure, and quality, determine the suitability for the particular applications. , For example, high-quality diamond films can be used for mechanical coatings and thermal conductivity materials because of their high hardness and exceptional thermal conductivity. (100) diamond films can be good optical window materials because of the high transmittance of (100) plane diamond films.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and Characterization of Diamond Microcrystals and Nanorods Deposited by Hot Cathode Direct Current Plasma Chemical Vapor Deposition Method

et al. 2008

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111) diamond microcrystals and (100) diamond microcrystals and nanorods were synthesized on Si substrate by hot cathode direct current plasma chemical vapor deposition method. The morphology, structure, and optical properties of the diamond films were characterized by scanning electron microscopy, X-ray diffraction, Raman spectra, and Fourier transform infrared spectra. The results showed that ( 111) and ( 100) diamond films can be grown under the condition of high-temperature (1223 K), low CH 4 concentration (4/300 sccm) and low temperature (1098 K), high CH 4 concentration (6/300 sccm), respectively. The (100) diamond film has lower purity and quality but higher optical transmittance than the (111) diamond film. Thus, the reactor temperature and CH 4 concentration are responsible for the growth of diamond films.

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“…This allows for the synthesis of carbon nanotubes, 2) the production of fuel gas, 5) or the decomposition of dissolved harmful substances and harmful liquids 3) that are detrimental to the environment. The extensive literature on the generation of plasma in liquid up to now has dealt almost exclusively with dielectric breakdown by arc discharge 6,7) or high-voltage pulsed discharge plasma. [8][9][10] However, insufficient attention has been given to techniques for the generation of plasma in liquid using MW or RF.…”

Section: Introductionmentioning

confidence: 99%

Observation of Microwave In-Liquid Plasma using High-Speed Camera

Mukasa

Nomura

Toyota

2007

jjap

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The behavior of 2.45 GHz microwave in-liquid plasma n-dodecane was observed using a high-speed camera. The system pressure before plasma generation was 1 or 100 hPa. The plasma was generated at the tip of a sharpened electrode, after which the plasma was found in a bubble in the liquid on the electrode. The plasma did not continuously emit light. The profile of light intensity varied between 1 and 100 hPa when the plasma faded. The behavior of the bubble by heat generation in the bubble was numerically simulated. To match experimental results, the heat generation was continued for 0.9 ms at 1 hPa and throughout the simulation at 100 hPa. The internal temperature ranged from 2,000 to 4,000 K, and the ratio of vapor n-dodecane to hydrogen produced by chemical reaction was at almost the same order at 1 hPa and approximately 1% at 100 hPa.

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DC-plasma-assisted synthesis of diamond and alumina using liquid

Cited by 10 publications

References 6 publications

Discharge Characteristics of Microwave and High-Frequency In-Liquid Plasma in Water

Discharge Characteristics of Microwave and High-Frequency In-Liquid Plasma in Water

Synthesis and Characterization of Diamond Microcrystals and Nanorods Deposited by Hot Cathode Direct Current Plasma Chemical Vapor Deposition Method

Observation of Microwave In-Liquid Plasma using High-Speed Camera

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