Deburring microfeatures using micro-EDM

Jeong, Young Hun; HanYoo, Byung; Lee, Han Ul; Min, Byung Kwon; Cho, Dong‐Woo; Lee, Sang Jo

doi:10.1016/j.jmatprotec.2009.04.021

Cited by 58 publications

(17 citation statements)

References 28 publications

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“…Burrs are often formed during machining and other manufacttiring processes, which may cause many problems in product assembly and operation (particularly for precision parts), and hence has been extensively studied [1][2][3][4][5][6][7][8]. The existing technologies remove (or suppress/inhibit) burrs through electrical discharge machining (EDM), the electrochemical approach, mechanical tools, ultrasonic wet peening, ultrasonic cavitation peening, ultrasonic elliptical vibration, abrasive jet machining, or laser deburring through direct laser radiation onto burrs, etc.…”

Section: Introductionmentioning

confidence: 99%

“…The existing technologies remove (or suppress/inhibit) burrs through electrical discharge machining (EDM), the electrochemical approach, mechanical tools, ultrasonic wet peening, ultrasonic cavitation peening, ultrasonic elliptical vibration, abrasive jet machining, or laser deburring through direct laser radiation onto burrs, etc. [1][2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

“…However, deburring is still a challenging process, and is more difficult for smaller features or parts [1], such as burrs on microfeatures created by micromachining processes, where deburring may require high spatial resolution and it is very challenging to effectively remove burrs without damaging or overmachining the fragile, useful microfeatures connected with the burrs. Lots of research work is still needed in this area.…”

Section: Introductionmentioning

confidence: 99%

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Deburring Effect of Plasma Produced by Nanosecond Laser Ablation

Zhou

Gao

et al. 2014

Journal of Manufacturing Science and Engineering

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This paper presents an interesting nanosecond (ns) laser-induced plasma deburring (LPD) effect (fivm microchannel sidewalls) discovered by the authors, which has been rarely reported before in the literature. Fast imagining study has been performed on plasma produced by ns laser ablation ofthe bottom of microchannels. It has been found that the plasma can effectively remove burrs fi-om the sidewall of the channels, while on the other hand microscopic images taken in this study did not show any obvious size or shape change of the channel sidewall after LPD. LPD using a sacrifice plate has also been studied, where the plasma for deburring is generated by laser ablation of the sacrifice plate instead of the workpiece. The observed laser-induced plasma deburring effect has several potential advantages in practical micromanufacturing applications, such as high spatial resolution, noncontact and no tool wear, and less possibility of damaging or overmachining useful microfeatures when removing burrs from them. The fundamental mechanisms for the obsei-ved laser-induced plasma deburring effect still require lots of further work to completely understand, which may include mechanical breaking of burrs due to high kinetic energies carried by plasma and the associated shock wave, and/or thermal transport from plasma to burrs that may cause their heating and phase change, or other mechanisms.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Deburring Effect of Plasma Produced by Nanosecond Laser Ablation

Zhou

Gao

et al. 2014

Journal of Manufacturing Science and Engineering

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“…Electrochemical deburring is useful for simultaneous deburring of multiple burr edges. Lee et al 11 and Jeong et al, 12 however, reported unintended damages to functional surfaces due to electrochemical deburring. Barletta 13 and Yan et al 14 reported that abrasive jet methods are efficient for small burrs in brittle materials.…”

Section: Introductionmentioning

confidence: 99%

Improvement of a deburring tool for intersecting holes with reduced irregular cutting of burr edge

Cho

Chae

Kim

2013

Proceedings of the Institution of Mechanical Engineers, Part B:

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A design optimization of deburring tools for intersecting holes is presented based on design of experiments and response surface methodology. A deburring tool with hemispherical cutter head mounted on a pivoted shaft was used to deburr intersecting holes easily and quickly. Due to the vibration of the tool during deburring, however, the surface of the deburred edge showed considerable irregularity. Tool dynamics was modeled with ADAMS software with the userdefined subroutines. Based on design of experiments and response surface methodology, the tool design was optimized with respect to tool vibration. Deburring tests with the optimized tool on Al6061-T6 specimens showed significant reduction in surface irregularity represented by an index value change from 1.3 to 0.7 mm.

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“…A few approaches to remove burrs on micro components fabricated from different bulk materials are described in literature. Micro-and ultrasonic wet peening (Horsch et al 2006), magnetic abrasive finishing method (Park et al 2005) or micro-electrical discharge machining (Yoo et al 2008;Jeong et al 2009) are examples. In order to reduce surface damage arising from mechanical deburring techniques electrochemical methods have been applied (Buhlert 2009;Schaller et al 1999).…”

Section: Introductionmentioning

confidence: 99%

Electropolishing as a method for deburring high aspect ratio nickel RF MEMS

et al. 2010

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High aspect ratio nickel radio frequency microelectromechanical systems (RF MEMS) were fabricated by X-ray lithography and electroplating. Control of growth during electroforming of micro components is in general a problem in terms of achieving homogeneous thickness due to a non-uniform current distribution across a layout. It is necessary to level the deposited layer by means of a lapping process which results in burr formation. To ensure the functional properties of the devices these burrs have to be removed. Electropolishing with a current density of 80 A/dm 2 is used for burr removal from nickel micro components containing small width (*10 lm) structural elements. The investigated metal removal rates range from 0.2 to 1.8 lm/s depending on burr formation, presence or absence of resist and device position in the layout during electropolishing. Furthermore, edge rounding, a common electropolishing effect, is only observed when electropolishing in the absence of resist.

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Deburring microfeatures using micro-EDM

Cited by 58 publications

References 28 publications

Deburring Effect of Plasma Produced by Nanosecond Laser Ablation

Deburring Effect of Plasma Produced by Nanosecond Laser Ablation

Improvement of a deburring tool for intersecting holes with reduced irregular cutting of burr edge

Electropolishing as a method for deburring high aspect ratio nickel RF MEMS

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