Deep level electron traps in n-GaN grown by metal organic vapor phase epitaxy (MOVPE) on Si (111) substrate were studied by means of deep level transient spectroscopy (DLTS). The growth of n-GaN on different pair number of AlN/GaN superlattice buffer layers (SLS) system and on c-face sapphire substrate are compared. Three deep electron traps labeled E2 (the energy level is not clear), E4 (0.7-0.8 eV), E5 (1.0-1.1 eV), were observed in n-GaN on Si substrate. And the concentrations of these traps observed for n-GaN on Si are very different from that observed for n-GaN on sapphire substrate. E4 is the dominant of these levels for n-GaN on Si substrate, and it is not related to linear array defect like dislocation line, but it behaves like point-defect based on the analysis by electron capture kinetics, in spite of having high dislocation density to the order of 10 10 cm -2 .