Deep range profiling by Rutherford backscattering and nuclear reaction analysis

Oberschachtsiek, P.; Schüle, V.; Günzler, R.; Weiser, M.; Kalbitzer, S.

doi:10.1016/0168-583x(90)90775-p

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1991

1994

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Cited by 6 publications

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“…For implantations at the lower energies, at 50-150 keV, the ion source at our laboratory was employed. Concentration profiles of heavy projectiles in low-Z solids can be measured to depths of 1-10~m by Rutherford backscattering spectrometry (RBS) of e's of some MeV energy [2]. Here the specific energy loss figures of the ~ particles are accurate to < 2 % (3), and, consequently, also the ranges derived from the energy spectra.…”

Section: Methodsmentioning

confidence: 99%