Deep ultraviolet distributed Bragg reflectors based on graded composition AlGaN alloys

Brummer, Gordie; Nothern, Denis; Nikiforov, A. I.; Moustakas, T. D.

doi:10.1063/1.4922215

Cited by 22 publications

(10 citation statements)

References 19 publications

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“…However, a true VCSEL requires distributed Bragg reflectors (DBRs) that are transparent and have reflectivity close to unity with sufficient bandwidth. Unfortunately, the reflectivity or bandwidth of III‐nitride DUV DBRs based on AlGaN materials has been limited due to a limited change of refractive index as a function of the Al composition .…”

Section: Introductionmentioning

confidence: 99%

100‐nm thick single‐phase wurtzite BAlN films with boron contents over 10%

Wang

Liu

et al. 2017

Physica Status Solidi (b)

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Growing thicker BAlN films while maintaining single‐phase wurtzite structure and boron content over 10% has been challenging. In this study, we report on the growth of 100 nm‐thick single‐phase wurtzite BAlN films with boron contents up to 14.4% by MOCVD. Flow‐modulated epitaxy was employed to increase diffusion length of group‐III atoms and reduce parasitic reactions between the metalorganics and NH3. A large growth efficiency of ∼2000 μm mol−1 was achieved as a result. Small B/III ratios up to 17% in conjunction with high temperatures up to 1010 °C were utilized to prevent formation of the cubic phase and maintain wurtzite structure.

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Section: Introductionmentioning

confidence: 99%

100‐nm thick single‐phase wurtzite BAlN films with boron contents over 10%

Wang

Liu

et al. 2017

Physica Status Solidi (b)

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“…The reflectivity of current state-of-the-art III-nitride DUV DBRs is still limited to an insufficient level of $80%. 17,18 In addition, DUV surface stimulated emission (SE) from the III-nitride heterostructures needs to be demonstrated, which can be then matched to the resonant wavelength in the cavity provided by the high reflectivity DBRs. This was yet reported prior to this study.…”

Section: Onset Of Surface Stimulated Emission At 260 Nm From Algan Mumentioning

confidence: 99%

Onset of surface stimulated emission at 260 nm from AlGaN multiple quantum wells

Xie

Ponce

et al. 2015

Applied Physics Letters

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We demonstrated onset of deep-ultraviolet (DUV) surface stimulated emission (SE) from c-plane AlGaN multiple-quantum well (MQW) heterostructures grown on a sapphire substrate by optical pumping at room temperature. The onset of SE became observable at a pumping power density of 630 kW/cm 2. Spectral deconvolution revealed superposition of a linearly amplified spontaneous emission peak at k $ 257.0 nm with a full width at half maximum (FWHM) of $12 nm and a superlinearly amplified SE peak at k $ 260 nm with a narrow FWHM of less than 2 nm. In particular, the wavelength of $260 nm is the shortest wavelength of surface SE from III-nitride MQW heterostructures to date. Atomic force microscopy and scanning transmission electron microscopy measurements were employed to investigate the material and structural quality of the AlGaN heterostructures, showing smooth surface and sharp layer interfaces. This study offers promising results for AlGaN heterostructures grown on sapphire substrates for the development of DUV vertical cavity surface emitting lasers (VCSELs). V

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“…Использование БЗ с плавными интерфейсами в нитридных ВИЛ обсуждалось в [21] в контексте их влияния на коэффициент отражения БЗ. Однако в этом случае ситуация осложняется еще и тем, что на границах пар слоев AlGaN/GaN или AlInN/GaN, из которых обычно изготавливаются БЗ, появляются поляризационные заряды [22], которые могут существенно изменить проводимость БЗ как в позитивном, так и в негативном направлении в зависимости от знака заряда.…”

Section: Introductionunclassified

Модифицированная Теория Связанных Волн И Численный Метод Для Анализа Брэгговских Зеркал С Произвольным Профилем Показателя Преломления

Мастеров¹,

Карпов²

2021

Журнал Технической Физики

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An analytical and effective numerical approach to the analysis of the optical characteristics of Bragg mirrors with an arbitrary refractive index profile is developed. Analytical expressions obtained using the modified theory of coupled waves for the coefficients of reflection / transmission of light from / through the BM with high accuracy predict its main characteristics at both low and high contrast of the refractive index. The hybrid numerical method includes the numerical calculation of the transfer matrix for one period of the knowledge base and its analytical multiplication for an arbitrary number of periods. The developed methods are applied to the analysis of the properties of practically important BMs made on the basis of sprayed pairs of Ta2O5 / SiO2 dielectrics, Group III nitrides and arsenides. The characteristics of the knowledge base with smooth (gradient) interfaces are considered in detail.

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Deep ultraviolet distributed Bragg reflectors based on graded composition AlGaN alloys

Cited by 22 publications

References 19 publications

100‐nm thick single‐phase wurtzite BAlN films with boron contents over 10%

100‐nm thick single‐phase wurtzite BAlN films with boron contents over 10%

Onset of surface stimulated emission at 260 nm from AlGaN multiple quantum wells

Модифицированная Теория Связанных Волн И Численный Метод Для Анализа Брэгговских Зеркал С Произвольным Профилем Показателя Преломления

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