Deep ultraviolet laser micromachining of novel fibre optic devices

Li, J; Dou, Jiantai; Herman, Peter R.; Fricke-Begemann, Thomas; Ihlemann, J.; Marowsky, G.

doi:10.1088/1742-6596/59/1/146

Cited by 5 publications

(1 citation statement)

References 4 publications

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“…Huo et al [ 4 ] fabricated several types of optical fiber probe with nano-tips by combining heated micro-pulling and static chemical etching. Concave, convex and spherical are the three types of optical fiber lens tips [ 5 ], which would be used for the convergence, divergence and coupling of light, respectively. Shen et al [ 6 , 7 ] performed rapid fabrication of an eyeball-like spherical micro-lens array (ESMA) by extrusion, which can focus light and enhance coupling efficiency.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of an Optical Fiber Micro-Sphere with a Diameter of Several Tens of Micrometers

Huang

Zhao

2014

Materials

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A new method to fabricate an integrated optical fiber micro-sphere with a diameter within 100 µm, based on the optical fiber tapering technique and the Taguchi method is proposed. Using a 125 µm diameter single-mode (SM) optical fiber, an optical fiber taper with a cone angle is formed with the tapering technique, and the fabrication optimization of a micro-sphere with a diameter of less than 100 µm is achieved using the Taguchi method. The optimum combination of process factors levels is obtained, and the signal-to-noise ratio (SNR) of three quality evaluation parameters and the significance of each process factors influencing them are selected as the two standards. Using the minimum zone method (MZM) to evaluate the quality of the fabricated optical fiber micro-sphere, a three-dimensional (3D) numerical fitting image of its surface profile and the true sphericity are subsequently realized. From the results, an optical fiber micro-sphere with a two-dimensional (2D) diameter less than 80 µm, 2D roundness error less than 0.70 µm, 2D offset distance between the micro-sphere center and the fiber stylus central line less than 0.65 µm, and true sphericity of about 0.5 µm, is fabricated.

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