Laser chemical processing: an overview to the 30th anniversary

Bäuerle, D.

doi:10.1007/s00339-010-5837-3

Cited by 21 publications

(9 citation statements)

References 154 publications

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“…65 Photochemical LACVD has also been proposed for the production of microstructures 66 but the results did not yield well-defined deposits as a result of diffusion of the excited molecules. 67 Photolytic deposition of metal-carbonyls (such as Fe(CO) 5 ) is a more widely used process for the deposition of thin metal films, with laser radiation wavelength typically below 350 nm. Other examples are the deposition of thin CrO 2 layers with UV lasers, requiring low deposition temperatures due to its metastable state and boron carbide films, using a CO 2 laser.…”

Section: General Laser-assisted Cvdmentioning

confidence: 99%

Laser-assisted growth of carbon nanotubes—A review

Burgt

2014

Journal of Laser Applications

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Laser-assisted chemical vapor deposition (LACVD) is an attractive maskless process for growing locally carbon nanotubes at selected places on substrates that may contain temperature-sensitive components. This review gives a comprehensive overview of the reported research with respect to laser assisted CVD for the growth of carbon nanotubes. The advantages and disadvantages of local growth using laser sources are discussed, with a focus on structural quality and properties, such as length, position and alignment, and process control. The paper is divided into two parts. The first part deals with the influence that the main parameters for nanotube growth-gas, catalyst and thermal energyhave on the growth of carbon nanotubes by laser-assisted synthesis. The second part deals with the attempts and successes to control different aspects of local nanotube growth using a laser-assisted growth method. V

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Section: General Laser-assisted Cvdmentioning

confidence: 99%

Laser-assisted growth of carbon nanotubes—A review

Burgt

2014

Journal of Laser Applications

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“…Nowadays, the high intensity of femtosecond laser pulses allows an extremely high precision in terms of localization of the deposited energy and thus the minimal affected zone and the reinforced resolution during micro-machining process [1]. This particular feature is due to the highly nonlinear nature of the laser-matter interaction for wide bandgap materials and has interesting applications especially in photonics, medicine and in the technologies of information and telecommunications [2][3][4][5][6]. Recently, from the increasing necessity of data handling and conservation, a new research field has emerged: the application of ultra fast technologies for long-term information storage [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Examination of femtosecond laser matter interaction in multipulse regime for surface nanopatterning of vitreous substrates

Varkentina¹,

Cardinal²,

Moroté³

et al. 2013

Opt. Express

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The paper presents our results on laser micro- and nanostructuring of sodium aluminosilicate glass for the permanent storage purposes and photonics applications. Surface structuring is realized by fs laser irradiation followed by the subsequent etching in a potassium hydroxide (10M@80 °C) for 1 to 10 minutes. As the energy deposited is lower than the damage and/or ablation threshold, the chemical etching permits to produce small craters in the laser modified region. The laser parameters dependent interaction regimes are revealed by microscopic analysis (SEM and AFM). The influence of etching time on craters formation is investigated under different incident energies, number of pulses and polarization states.

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“…Once the laser beam illuminates the sample, the mass leaves the surface in the form of electrons, ions, atoms, molecules, clusters, and particles, each of the processes separated in time and space. , However, during methane decomposition in plasma, the ablated catalysts are mostly metal NPs such that methane molecules can attach to them, with subsequent catalysis of the decomposition to CH 2 and then recombination to higher compounds. , The method involves the condensation of atoms/molecules and cluster formation (with or without any chemical reactions) during the fast expansion of the vapor/plasma plume generated in front of a target. The time of nucleation and size and composition of clusters depend on the type of material, the laser parameters, and the ambient medium …”

Section: Theorymentioning

confidence: 99%

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

et al. 2014

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Methane decomposition has been extensively investigated using a Q-switched Nd:YAG laser, focused on the metal catalysts including Ni, Fe, Pd, and Cu within the controlled chamber to verify the effect of catalyst, plasma properties, and yield and selectivity of the products. Fourier transform IR spectroscopy (FTIR) and gas chromatography (GC) are employed to support the characterization of the components. This indicates that methane is strongly decomposed within the metal-assisted laser-induced plasma, leading to the subsequent recombination and the production of heavier hydrocarbons. The dominant species, including propane, ethane, and ethylene, have been identified examining different metallic catalysts. The dissociation rate, conversion ratio, selectivity, and yield of products are strongly dependent on the metal target and plasma characteristics.

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Laser chemical processing: an overview to the 30th anniversary

Cited by 21 publications

References 154 publications

Laser-assisted growth of carbon nanotubes—A review

Laser-assisted growth of carbon nanotubes—A review

Examination of femtosecond laser matter interaction in multipulse regime for surface nanopatterning of vitreous substrates

Methane Decomposition Using Metal-Assisted Nanosecond Laser-Induced Plasma at Atmospheric Pressure

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