2001
DOI: 10.1063/1.1384907
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Defect characterization in ZnO layers grown by plasma-enhanced molecular-beam epitaxy on (0001) sapphire substrates

Abstract: Articles you may be interested inElectron scattering mechanisms in GZO films grown on a-sapphire substrates by plasma-enhanced molecular beam epitaxy

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Cited by 109 publications
(44 citation statements)
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“…Before growth, the substrate was annealed at 750 °C under vacuum ≈10 −9 Torr for 15 min, and subsequently exposed in oxygen plasma to make the surface of (0001) Al 2 O 3 O-terminated. [ 43 ] A designed four-step buffer layers [ 44 ] were deposited in sequence for reducing the mismatch between the epitaxial fi lms and the substrate. Then three samples with different Be source temperature (0, 1000, and 1025 °C) were grown at T sub = 500 °C.…”
Section: Fabrication Of N-doped Bezno Films and P-i-n Junctions On Samentioning
confidence: 99%
“…Before growth, the substrate was annealed at 750 °C under vacuum ≈10 −9 Torr for 15 min, and subsequently exposed in oxygen plasma to make the surface of (0001) Al 2 O 3 O-terminated. [ 43 ] A designed four-step buffer layers [ 44 ] were deposited in sequence for reducing the mismatch between the epitaxial fi lms and the substrate. Then three samples with different Be source temperature (0, 1000, and 1025 °C) were grown at T sub = 500 °C.…”
Section: Fabrication Of N-doped Bezno Films and P-i-n Junctions On Samentioning
confidence: 99%
“…Several growth techniques, such as spray pyrolysis, sputtering, pulsed laser deposition (PLD), molecular beam epitaxy (MBE) and metal-organic chemical vapour deposition (MOCVD), have been extensively used for the deposition of ZnO films and most of this work has been extensively reviewed [1][2][3][4]. High-quality ZnO epilayers have usually been grown on crystalline substrates, such as sapphire by PLD [5][6][7], MBE [8][9][10] and MOCVD [11,12]. In recent years, there has been an increasing interest in the growth of ZnO epilayers by sputtering [13][14][15][16][17][18][19][20][21][22].…”
Section: Introductionmentioning
confidence: 99%
“…The (0001) 28 has been applied to determine the polarity ( Figure 4E), and the result indicates that the interior surface of the ring is (0001)-Zn and the exterior surface is (0001 h)-O. 29 Physically, if the surface charges are uncompensated during the growth, 30 the net dipole moment tends to diverge and the electrostatic energy increases.…”
mentioning
confidence: 99%