2018
DOI: 10.1016/j.surfcoat.2018.02.008
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Defect formation and optical activation of Tb implanted AlxGa1−xN films using channeled implantation at different temperatures

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Cited by 9 publications
(7 citation statements)
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“…Related to the former, it is first time the software is presented as final version to the scientific community. The latter, acronym for multiple reflection optimization package for XRD, in its single reflection mode has been often used for the simulation (and fitting) of the 2θ-ω scans using the dynamical theory of XRD [32][33][34][35][36][37][38] while the multiple reflection mode has been recently presented [38]. The code employs the dynamical theory of XRD and considers the effects of the instrumental function and the presence of Cu Kα 2 .…”
Section: Samples and Description Of The Experimental Techniquesmentioning
confidence: 99%
“…Related to the former, it is first time the software is presented as final version to the scientific community. The latter, acronym for multiple reflection optimization package for XRD, in its single reflection mode has been often used for the simulation (and fitting) of the 2θ-ω scans using the dynamical theory of XRD [32][33][34][35][36][37][38] while the multiple reflection mode has been recently presented [38]. The code employs the dynamical theory of XRD and considers the effects of the instrumental function and the presence of Cu Kα 2 .…”
Section: Samples and Description Of The Experimental Techniquesmentioning
confidence: 99%
“…[54][55][56] Additional information about the crystalline quality of the AlGaN samples obtained via Rutherford backscattering/channelling and transmission electron microscopy can be found in ref . 42 The films show high single crystalline quality and the dominant defects are threading dislocations as typically found in III-nitride heteroepitaxial films. Parallel and perpendicular to the sample surface lattice parameters were confirmed using reciprocal space mapping of an asymmetrical reflection, in this case , at the glancing incident angle geometry.…”
Section: Samples and Experimental Technique Descriptionmentioning
confidence: 92%
“…Several publications using previous version of this software can be found. [40][41][42] The simulation is accomplished using the recursive formalism described in ref. 57 based on the dynamical theory of X-ray diffraction.…”
Section: Samples and Experimental Technique Descriptionmentioning
confidence: 99%
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