Defect induced formation of CoSi2 nanowires by focused ion beam synthesis

Akhmadaliev, Ch.; Schmidt, Bernd; Bischoff, L.

doi:10.1063/1.2400068

Cited by 14 publications

(9 citation statements)

References 19 publications

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“…Indeed, several reports of NW breakup do exist. 554,556,566 An even more complex process was demonstrated in Ref. 510.…”

Section: Ion Beam Synthesis Of Nwsmentioning

confidence: 99%

“…557 FIB processing has also been used to improve on the electrical contact between NWs and electrodes. 558 The NW formation on surfaces can be enhanced by annealing to form, e.g., metal silicides, 512,554,556,559 ͑see Fig. 74͒ approach can be combined with etching methods to enhance the processing speed and obtain high-aspect ratio standing NWs.…”

Section: Ion Beam Synthesis Of Nwsmentioning

confidence: 99%

“…This approach has the advantage that the NWs can be placed accurately where desired, but on the other hand contamination of the material from the ͑typically Ga͒ ion beam can be a serious issue. 554 FIBs have been used to manufacture both NWs lying on substrates 512,[554][555][556] and also standing NWs. 557 FIB processing has also been used to improve on the electrical contact between NWs and electrodes.…”

Section: Ion Beam Synthesis Of Nwsmentioning

confidence: 99%

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Ion and electron irradiation-induced effects in nanostructured materials

Krasheninnikov¹,

Nordlund²

2010

Journal of Applied Physics

947

591

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A common misconception is that the irradiation of solids with energetic electrons and ions has exclusively detrimental effects on the properties of target materials. In addition to the well-known cases of doping of bulk semiconductors and ion beam nitriding of steels, recent experiments show that irradiation can also have beneficial effects on nanostructured systems. Electron or ion beams may serve as tools to synthesize nanoclusters and nanowires, change their morphology in a controllable manner, and tailor their mechanical, electronic, and even magnetic properties. Harnessing irradiation as a tool for modifying material properties at the nanoscale requires having the full microscopic picture of defect production and annealing in nanotargets. In this article, we review recent progress in the understanding of effects of irradiation on various zero-dimensional and one-dimensional nanoscale systems, such as semiconductor and metal nanoclusters and nanowires, nanotubes, and fullerenes. We also consider the two-dimensional nanosystem graphene due to its similarity with carbon nanotubes. We dwell on both theoretical and experimental results and discuss at length not only the physics behind irradiation effects in nanostructures but also the technical applicability of irradiation for the engineering of nanosystems.

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“…Indeed, several reports of NW breakup do exist. 554,556,566 An even more complex process was demonstrated in Ref. 510.…”

Section: Ion Beam Synthesis Of Nwsmentioning

confidence: 99%

Section: Ion Beam Synthesis Of Nwsmentioning

confidence: 99%

Section: Ion Beam Synthesis Of Nwsmentioning

confidence: 99%

See 1 more Smart Citation

Ion and electron irradiation-induced effects in nanostructured materials

Krasheninnikov¹,

Nordlund²

2010

Journal of Applied Physics

947

591

View full text Add to dashboard Cite

show abstract

“…As shown in Fig. 19.40b in the case of a small misaligned FIB trace, the nanowires are not stable and decay into shorter ones chains of CoSi 2 nanoparticles [109,110]. Larger angles of misalignment result in the formation of chains of more or less prolonged CoSi 2 nanoparticles (Fig.…”

Section: Fib Assisted Synthesis Of New Solid-state Phasesmentioning

confidence: 94%

Nanostructures by Mass-Separated FIB

Bischoff

Böttger

Philipp

et al. 2013

Lecture Notes in Nanoscale Science and Technology

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The introduction of mass-separated systems in the field of focused ion beams significantly increases the area of application in nanotechnology due to the availability of a broad spectrum of ions with the same advantages compared to classical Ga instruments. A short description of the configuration of a mass-separated FIB tool is given as well as the fundamentals of alloy liquid metal ion sources. Examples of application include patterned tailoring of functional surfaces and ioninduced phase transformation in thin layers, in particular the Si nanowire fabrication by FIB implantation and subsequent wet-chemical, anisotropic etching and the FIB lithography of thin ta-C films. Furthermore, the ion beam synthesis (IBS) of CoSi 2 nanostructures by Co-FIB writing and annealing, and the modification of surface morphology by various mono-and polyatomic projectiles in a broad energy and temperature range in different materials are described and discussed.

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“…Top-down processes are capable for fabrication of both vertical and horizontal NW on different substrates. The horizontal NW fabrication is mainly performed on the Si-on-insulator (SOI) substrates by using different nanopatterning techniques, such as focused-ion-beam lithography 6 and electron beam lithography. The buried oxide (BOX) layer in SOI serves as the etch stop layer.…”

confidence: 99%

Fabrication of horizontal silicon nanowire arrays on insulator by ion irradiation

Kögler

Wei

et al. 2011

AIP Advances

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We report a simple and potentially mass productive technique to fabricate horizontal single crystalline Si nanowire arrays on insulating substrate based on a self-organized pattern formation mechanism during Xe+ ion beam irradiation of Si-on-insulator material. A periodic ripple surface pattern is created by ion irradiation at 67o incidence angle to the surface normal. The transfer of this pattern to the oxide interface results in an array of electrically disconnected parallel ordered Si nanowires on the insulating oxide. Doping of the nanowires was demonstrated by boron ion implantation and annealing. The morphology and resistivity of the narrow nanowires with large aspect ratio were analysed by cross sectional transmission electron microscopy and scanning spreading resistance microscopy, respectively. Physical reasons of the observed low carrier activation are discussed

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Defect induced formation of CoSi2 nanowires by focused ion beam synthesis

Cited by 14 publications

References 19 publications

Ion and electron irradiation-induced effects in nanostructured materials

Ion and electron irradiation-induced effects in nanostructured materials

Nanostructures by Mass-Separated FIB

Fabrication of horizontal silicon nanowire arrays on insulator by ion irradiation

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