2001
DOI: 10.1143/jjap.40.6081
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Defect Structure of Heteroepitaxial SnO2 Thin Films Grown on TiO2 Substrates

Abstract: Heteroepitaxal SnO 2 thin films were grown on rutile (100) TiO 2 single crystal substrates by pulsed laser deposition. The defect structure and surface morphology were investigated by transmission electron microscopy, reflection high-energy electron diffraction, and atomic force microscopy. The misfit-induced large biaxial compressive stress in the 200-nm-thick SnO 2 thin film was almost fully relaxed to yield the high-density interfacial misfit dislocations and related planar defects. The misfit dislocation n… Show more

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Cited by 21 publications
(25 citation statements)
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“…During late-stage annealing at the relatively low temperature of 450°C, the abundant Pd and SnO 2 nanoparticles, being seeds, then induced the early crystallization of the amorphous TiO 2 to a rutile phase following the lattices of the Pd and rutile SnO 2 crystallites to exhibit Pd (111) ) rutile TiO 2 (101) and SnO 2 (110) ) rutile TiO 2 (110) orientations. Similar studies of the induced crystallization of SnO 2 films by crystalline TiO 2 substrates or of TiO 2 particles by SnO 2 crystallites as well as of crystal structures or lattice mismatches 37,38 have verified the possibility of the structural correlations observed herein.…”
Section: Tio 2 (450°c Annealed)/sno 2 -Pd Heterostructures (Samples A)supporting
confidence: 83%
“…During late-stage annealing at the relatively low temperature of 450°C, the abundant Pd and SnO 2 nanoparticles, being seeds, then induced the early crystallization of the amorphous TiO 2 to a rutile phase following the lattices of the Pd and rutile SnO 2 crystallites to exhibit Pd (111) ) rutile TiO 2 (101) and SnO 2 (110) ) rutile TiO 2 (110) orientations. Similar studies of the induced crystallization of SnO 2 films by crystalline TiO 2 substrates or of TiO 2 particles by SnO 2 crystallites as well as of crystal structures or lattice mismatches 37,38 have verified the possibility of the structural correlations observed herein.…”
Section: Tio 2 (450°c Annealed)/sno 2 -Pd Heterostructures (Samples A)supporting
confidence: 83%
“…We consider that a relaxation of the ε th//[010] at the electrode layer might contribute to the difference. The gliding plane of the rutile and perovskite crystal are (101) and (110), respectively [13,14]. Hence, the ε th// [010] can be relaxed by the dislocation at the gliding plane parallel to the substrate surface.…”
Section: Domain Fraction Dependence On Thermal Strainmentioning
confidence: 99%
“…For epitaxial growth of SnO 2 films, several deposition techniques have been employed, including sputtering [16], atomic layer deposition (ALD) [17][18][19], pulsed laser deposition (PLD) [20,21], molecular beam epitaxy (MBE) [22,23], and metal organic chemical vapor deposition (MOCVD) [24], and the commonly used substrates are sapphire, TiO 2 , and SrTiO 3 single crystals [16][17][18][19][20][21][22][23][24]. However, most of the deposited films were the conventional rutile SnO 2 .…”
Section: Introductionmentioning
confidence: 99%