1997
DOI: 10.1063/1.366001
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Defect study in amorphous silicon/crystalline silicon solar cells by thermally stimulated capacitance

Abstract: Interface traps created by amorphous silicon (a-Si) deposition using dc magnetron sputtering or a microwave plasma-enhanced chemical vapor deposition method onto p-type crystalline silicon (c-Si) substrates in solar cell structures were studied by thermally stimulated capacitance. The trap properties (type, energy, and concentration) have been estimated as a function of various cell fabrication conditions. Plasma deposition of a-Si is seen to induce electron traps when the c-Si substrates are pretreated with h… Show more

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Cited by 11 publications
(4 citation statements)
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“…In order to verify this hypothesis we have applied the method commonly used to distinguish between the surface and bulk states. This method comprises of the analysis of different biasing conditions on the TSCAP signal, defined as the difference in the capacitance after and before an optical pump [8]. The results of applying different bias on the TSCAP signal for the studied samples are given in Fig.…”
Section: Persistent Photoeffects and Tscap Studiesmentioning
confidence: 99%
“…In order to verify this hypothesis we have applied the method commonly used to distinguish between the surface and bulk states. This method comprises of the analysis of different biasing conditions on the TSCAP signal, defined as the difference in the capacitance after and before an optical pump [8]. The results of applying different bias on the TSCAP signal for the studied samples are given in Fig.…”
Section: Persistent Photoeffects and Tscap Studiesmentioning
confidence: 99%
“…In addition, it has been reported that the interface condition, such as band offset and interface defects, significantly affects the carrier transport and photovoltaic properties of these solar cells [7][8][9]. Techniques for obtaining a high-quality interface include bandgap grading and passivation of the interface states by chemical HF etching [10], atomic hydrogen treatment [8], and deposition of an a-Si:H passivation layer [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…Particular treatments of the crystalline surface have been investigated, such as wet cleaning by HF solutions [4] passivation by hydrogen [1,2], dry cleaning by plasmas of CF 4 [5] and CF 4 +O 2 [6], and the use of a microcrystalline (lc) [3], or a-Si:H [1] thin layer as a buffer layers to improve the interface with the c-Si substrate.…”
Section: Introductionmentioning
confidence: 99%