“…The simulations on the mechanical properties and deformation mechanism of silicon indicated the appearance of the metastable phases, Si-II, Si-XII, and amorphous phase during nanoindentation process. Whilst, several simulated results showed that the Si-I transformed into two types of body-centered-tetragonal phase, i.e., β-Si and Bct5 with fivefold coordination [4,22,23]. The abrasive wear of monocrystalline silicon showed a new phase transformation route, i.e., an initial diamond cubic silicon turned into high density amorphous phase beneath the moving particle and, then transformed into low density metastable amorphous phase in both two-body and three-body abrasion [24,25].…”