In the operations of optical inertial sensors, geometric variations due to temperature and operation environments cause thermoelastic deformations of their components, which lead to changes in the area and perimeter of their resonator block. The fluctuations in the geometric scale factor are corrected by the piezoelectric actuator. This article presents the numerical formulation of the elastic behaviour of each piezoelectric actuator, and the numerical formulations are verified through comparisons with the results of a finite element simulation.