Degradation and failure analysis of Polysilicon Resistor connecting with Tungsten contact and Copper line

Huang, Clement; Lin, Mingte; Liang, James W.; Juan, Alex; Su, K. C.

doi:10.1109/irps.2011.5784568

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Cited by 6 publications

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“…Well known of the resistor's property would be efficient to determine the defect. [1] Resistor plays a key role in circuit designer's view as it was indispensable for the whole circuit function. It was mainly used not only to divide voltage and limit current, but also compose the oscillator and feedback circuit.…”

Section: Introductionmentioning

confidence: 99%

Fault isolation by conquering obstruction effect of resistor in complex cases analysis

Wen¹

2014

Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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Resistor plays a key role in circuit designer's view as it was indispensable for the whole circuit function. But for integrated circuit failure analysis, the effect of resistor contained both guidance and as well as blocks to find the root cause. The obstruction effect of resistor was seldom studied in failure analysis. This paper presented how resistor to be block for failure analysis. And how to conquer the obstruction effect was also studied which will be helpful in analyzing complicated failure cases.

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Section: Introductionmentioning

confidence: 99%