2015
DOI: 10.1021/am506891d
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Dense Arrays of Uniform Submicron Pores in Silicon and Their Applications

Abstract: We report a versatile particle-based route to dense arrays of parallel submicron pores with high aspect ratio in silicon and explore the application of these arrays in sensors, optics, and polymer micropatterning. Polystyrene (PS) spheres are convectively assembled on gold-coated silicon wafers and sputter-etched, resulting in well-defined gold disc arrays with excellent long-range order. The gold discs act as catalysts in metal-assisted chemical etching, yielding uniform pores with straight walls, flat bottom… Show more

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Cited by 51 publications
(41 citation statements)
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“…Plasma etching and gel‐swelling techniques can also be used to vary the pitch and diameter of the pattern, which can then be transferred to the surface via multiple methods, such as ion bombardment or metal‐assisted chemical etching . Depositing different sizes of colloidal nanoparticle onto the same substrate allows for more complex pattern formation, a process which has been used to fabricate arrays of periodically spaced nanowires with two different diameters .…”
Section: Fabrication Techniquesmentioning
confidence: 99%
See 1 more Smart Citation
“…Plasma etching and gel‐swelling techniques can also be used to vary the pitch and diameter of the pattern, which can then be transferred to the surface via multiple methods, such as ion bombardment or metal‐assisted chemical etching . Depositing different sizes of colloidal nanoparticle onto the same substrate allows for more complex pattern formation, a process which has been used to fabricate arrays of periodically spaced nanowires with two different diameters .…”
Section: Fabrication Techniquesmentioning
confidence: 99%
“…Nanowires, [136,137] nanopillars, [31] nanostructures, [138,139] nanopits/nanopores, [140,141] nanoelectrodes, [28,65,85,142] ≈0.04-0.5 [143] ≤300 (in theory, but in reality individual field size ≈1 × 1) [144] Best resolution Flexible design (no fixed tooling required)…”
Section: Electron-beam Lithographymentioning
confidence: 99%
“…85 In particular, colloidal monolayers have been used to create porous, graded-index materials with low reflectivity by, for example, plasma etching of colloidal monolayers, 194 inverting the monolayer, 95 or using the monolayer as an etching mask to generate pillars. 166,187,195 To reduce the reflection from the top surface of solar cells, many methods are used to generate porous materials with the proper optical thickness and effective index for optimal transmission. A recent perspective discusses many of these methods.…”
Section: Factors Affecting Optical Applicationsmentioning
confidence: 99%
“…For comparison, the wings of the hawkmoth, Cephonodes hylas have a reflectance of less than 2% over the range of 200–800 nm . While nature has employed this phenomenon for quite some time, AR coatings have only recently been finding their way into a wide range of modern applications, including: photovoltaic (PV) cells and solar thermal collectors, television screens/monitors, light‐emitting diodes (LEDs), windows, photonic crystals (PCs), biomedical devices, optical biosensors, lenses, lasers, and many other applications, as shown in Figure .…”
Section: Introductionmentioning
confidence: 99%