2005
DOI: 10.1364/opex.13.010049
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Densely folded spectral images of the CCD spectrometer working in the full 200-1000nm wavelength range with high resolution

Abstract: A new charge-coupled device (CCD) spectrometer has been studied and constructed by using a two-dimensional CCD detector and an integrated grating consisting of 10 subgratings. Effective spectral images of 268 mm along the dispersion direction have been densely folded 10 times to cover the full 200-1000 nm working wavelength range without any mechanical moving elements. The results show that the system has a spectral resolution and acquisition time of better than 0.07 nm and less than 100 ms, respectively, in t… Show more

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Cited by 28 publications
(18 citation statements)
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“…wavelengths on the corresponding camera (detector) pixels. In other words, the calibration of a spectrometer can be achieved by assigning the detected spectral peaks of a calibration lamp or a tunable laser using higher-order polynomial curve fitting [5]- [7]; the fitting curve represents the pixel-wavelength matching profile to cover every wavelength in the spectrometer. However, tunable lasers are relatively expensive, require calibration [8], and are limited by the tuning range [9].…”
Section: Introductionmentioning
confidence: 99%
“…wavelengths on the corresponding camera (detector) pixels. In other words, the calibration of a spectrometer can be achieved by assigning the detected spectral peaks of a calibration lamp or a tunable laser using higher-order polynomial curve fitting [5]- [7]; the fitting curve represents the pixel-wavelength matching profile to cover every wavelength in the spectrometer. However, tunable lasers are relatively expensive, require calibration [8], and are limited by the tuning range [9].…”
Section: Introductionmentioning
confidence: 99%
“…With the development of densely folded spectral images of a charge-coupled device (CCD) spectrometer [34,35], it is possible to obtain the real time spectrum with high accuracy and resolution in the collecting time of CCD without moving of the mechanical devices. [37].…”
Section: Spectroscopic Ellipsometermentioning
confidence: 99%
“…[7][8][9] This method reduces post-processing needs but complicates system design. The other direct calibration methods proposed include a characteristic wavelength method 10 and a spectral interferogram mapping method, 11,12 which are based on directly measuring part of the wavelength distribution on the charge-coupled device (CCD) by standard equipment and then performing polynomial fitting to obtain the wavelength alignment on the whole CCD pixels. The need of external devices such as an external light source with known spectral features or a well-calibrated commercial optical spectrum analyzer (OSA) increases system complicity and cost.…”
Section: Introductionmentioning
confidence: 99%