2020
DOI: 10.35848/1347-4065/abcc14
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Density functional theory study of oxygen vacancy defect diffusion properties in λ-Ta2O5

Abstract: The formation energy and diffusion properties of oxygen vacancy defects in λ-Ta2O5 were studied using first-principle calculations. The calculated formation energy of neutral oxygen vacancy defects was consistent with previous studies carried out, and the charged oxygen defects considering periodic correction were also studied. The calculations obtained showed that the formation energy of +2 charged oxygen vacancy defects was 0.83–1.16 eV. Also, the diffusion activation energy consisting of oxygen vacancy defe… Show more

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Cited by 5 publications
(5 citation statements)
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“…Timeline showing the key development in different phases of Ta 2 O 5 from both experiment and theoretical predictions. …”
Section: Crystal Structures Of Ta2o5mentioning
confidence: 99%
“…Timeline showing the key development in different phases of Ta 2 O 5 from both experiment and theoretical predictions. …”
Section: Crystal Structures Of Ta2o5mentioning
confidence: 99%
“…6(a); these peaks were determined to correspond to λ-Ta 2 O 5 (120), λ-Ta 2 O 5 (011), and λ-Ta 2 O 5 (220), respectively. [21][22][23] It is considered that the Ta 2 O 5 film deposited on Pt/Si consisted of λ-Ta 2 O 5 . The SAW response was weak and the k t 2 value obtained from the HBAR response of the Ta 2 O 5 /Pt/Si sample was smaller than that of the Ta 2 O 5 /a-Ta 2 O 5 /Pt/Si sample not affected by the Pt lattice plane.…”
Section: Discussionmentioning
confidence: 99%
“…16) In addition, Ta 2 O 5 thin films also have a high dielectric constant. 17) The crystal systems of Ta 2 O 5 , such as orthorhombic β-Ta 2 O 5 , 18,19) hexagonal δ-Ta 2 O 5 , 18,20) and orthorhombic λ-Ta 2 O 5 , [21][22][23] have been investigated.…”
Section: Introductionmentioning
confidence: 99%
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