Deoxyribonucleic acid sensing device with 40-nm-gap-electrodes fabricated by low-cost conventional techniques

Abstract

A sensing device for the detection of a very small amount of the deoxyribonucleic acid (DNA) with the order of femtoliter is described. Such a sensing device has metal electrodes with a 40nm gap, and is fabricated by low-cost technology with the conventional photolithography and anodic oxidation. Gold (Au) electrodes are used to fix DNA, and the electric currents between two electrodes are measured to detect the existence of DNA. The results indicate that the present device is promising as future very low-cost DNA analyzing chips.

Polymer‐Protected Sub‐2‐nm‐Nanogap Fabrication for Biological Sensing in Near‐Physiological Conditions

“…Electrical detection schemes have recently gained significant attention because they are label‐free and capable of rapidly detecting minuscule quantities of molecules 7–15. Among electrical‐based detection methods, nanogap devices that comprise a pair of electrodes with separations on the order of nanometers have been intensively investigated 11–20. Several approaches, including nanoimprinting,15 electron‐beam lithography,21, 22 dip‐pen lithography,23 shadow masking,24 electrochemical etching/deposition,25 and thermally‐assisted electromigration of lithographically defined narrow thin wires,26–31 have been demonstrated to fabricate sub‐100‐nm gaps.…”

RNA and DNA Diagnostics

“…Nanogaps were described by Hashioka et al (2004) for DNA detection, generally based on gold electrodes (used to graft DNA probes) separated by a 40 nm gap.…”

Self‐Aligned Sub‐10‐nm Nanogap Electrode Array for Large‐Scale Integration

“…In fact, a technique that is compatible with traditional microfabrication processes to fabricate NGs on a large scale and at a low cost is in high demand. Although several promising methods have been demonstrated,21, 22 the fabrication of NG electrodes in ordered arrays with high precision and reproducibility remains a significant challenge. Herein, we describe a method of fabricating self‐aligned planar NG electrodes using the photolithography technique, which is fully compatible with traditional microfabrication processes.…”