2012
DOI: 10.1016/j.jallcom.2011.11.039
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Dependence of soft magnetic properties and high frequency characteristics on film thickness for Ni75Fe25–ZnO nano-granular films

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Cited by 15 publications
(1 citation statement)
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“…Ferromagnetic FeNi-ZnO thin films have been manufactured on glass by radio frequency (RF) magnetron co-sputtering [13] with background pressure below 1.2 × 10 −4 Pa and sputtering Ar pressure of 0.12 Pa. The sputtering power of Fe 25 Ni 75 target was fixed to 100 W. And the sputtering power of ZnO target was 20 W and 60 W during deposition.…”
Section: Methodsmentioning
confidence: 99%
“…Ferromagnetic FeNi-ZnO thin films have been manufactured on glass by radio frequency (RF) magnetron co-sputtering [13] with background pressure below 1.2 × 10 −4 Pa and sputtering Ar pressure of 0.12 Pa. The sputtering power of Fe 25 Ni 75 target was fixed to 100 W. And the sputtering power of ZnO target was 20 W and 60 W during deposition.…”
Section: Methodsmentioning
confidence: 99%