Dependence of the mechanical and structural properties of (Ti,Al)N films on the nitrogen content

Abstract

Ti,Al)N films with increasing nitrogen content were grown by reactive cosputtering and characterized by auger electron spectroscopy, grazing x-ray diffraction, polarization curves, electrochemical impedance spectroscopy, nanoindentation, and atomic force microscopy. For Ti/Al ≈ 1 the Ti 1−x Al x N phase is always present, but lower nitrogen contents lead to an additional phase, probably ␣-Ti(Al), which causes a decrease in hardness and Young's modulus. The increase of nitrogen content results in a decrease of surface roughness or a more compacted surface coating, according to the impedance results.

Effect of ductile layers in mechanical behaviour of TiAlN thin coatings

“…TiAlN coating present an excess of aluminium relative to the chemical composition of the target, which can be due to the higher deposition rate of aluminium relative to titanium. The hardness of (Ti 0.46 Al 0.54 ) 0.96 N coating is slightly higher than the values found in the literature for similar chemical composition [1,8,13,15], but is lower than the other coatings of multicomponent nitrides of refractory metals, such as W-Ti-N [16,17]. Moreover, the H/E values are similar to TiN and lower than other transition metal nitrides (M 1 -M 2 -N) [18].…”

“…However, the loose of hardness and oxidation of these coatings, at cutting temperatures, refrained the cutting speed. The presence of Al in TiAlN coatings overcomes the oxidation problems due to the presence of a superficial layer of Al 2 O 3 formed at high temperatures [2][3][4][5][6][7][8].…”

Characterisation and Corrosion Resistance of TiCrN Composite Coating on Steel by Physical Vapour Deposition Method

“…TiAlN thin films are now commercially available as wear resistant coatings for high-speed machining, due to their high hardness, excellent oxidation and corrosion resistance. The presence of Al in TiAlN coatings overcomes the oxidation problems due to the presence of a superficial layer of Al 2 O 3 formed at high temperatures [7][8][9][10][11][12][13]. In comparison with TiN-based coatings (e.g.…”

TiNxOy/TiN dielectric contrasts obtained by ion implantation of ; structural, optical and electrical properties

“…The search for adapted TiN properties for specific applications opened the path for the proposal of derived ternary compounds among which, TiCN [7] and TiBN [8] for tribomechanics, TiAlN for corrosion resistance [9], TiCrN for magnetic properties [10] or TiNO [11,12] for modified optical properties. The exploitation of TiN in plasmonic devices passes through structural requirements such as patterning in dielectric micro and nano environments [6].…”