Source/drain electrodes contact effect on the stability of bottom-contact pentacene field-effect transistors AIP Advances 2, 022113 (2012) All-metallic lateral spin valves using Co2Fe(Ge0.5Ga0.5) Heusler alloy with a large spin signal Appl. Phys. Lett. 100, 052405 (2012) Contact transport of focused ion beam-deposited Pt to Si nanowires: From measurement to understanding Appl. Phys. Lett. 100, 053503 (2012) Ab initio quantum transport simulation of silicide-silicon contacts J. Appl. Phys. 111, 014305 (2012) Impact of fluorine treatment on Fermi level depinning for metal/germanium Schottky junctions Appl. Phys. Lett. 99, 253504 (2011) Additional information on J. Appl. Phys. A new mechanism of contact resistance formation in ohmic contacts with high dislocation density is proposed. Its specific feature is the appearance of a characteristic region where the contact resistance increases with temperature. According to the mechanism revealed, the current flowing through the metal shunts associated with dislocations is determined by electron diffusion. It is shown that current flows through the semiconductor near-surface regions where electrons accumulate. A feature of the mechanism is the realization of ohmic contact irrespective of the relation between the contact and bulk resistances. The theory is proved for contacts formed to III-V semiconductor materials as well as silicon-based materials. A reasonable agreement between theory and experimental results is obtained.