Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage

Attia, Patrick; Hesto, P.

doi:10.1016/s0026-2692(98)00006-8

Cited by 9 publications

(5 citation statements)

References 5 publications

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“…doubled) thus confirming our suspicion. Although electrostatic forces were used elegantly to damp AFM cantilevers sometime ago [7] and to drive cantilevers more recently [8,9], what is new in our work is the long working distance (mm) that allows an effective electrostatic driving that contaminates the pure magnetic driving of cantilevers not properly shielded. And now it is easy to understand why the driving of the solenoid not only excited the MADOTR4 cantilever, but also the NP and the "peeled" ones placed side by side in the centre of the front face of the solenoid.…”

Section: Measurements Under Coherent Drivingmentioning

confidence: 99%

“…In this way an unintentional electrostatic driving of the cantilevers has been found whose effects and consequences are the main subject of this paper. Although magnetic and electrostatic stimulation of cantilevers have been used as separated entities [2,3,[5][6][7][8][9][10], the simultaneous existence of magnetic forces (MF) and electrical forces (EF) acting on cantilevers close to solenoids not electrostatic shielded, has not been considered up to now. This feature, however, determines the performances of feedback loops used around cantilevers to improve their sensing capabilities, specially when low-cost phase shifters as integrators are used to obtain signals in quadrature (e.g.…”

Section: Introductionmentioning

confidence: 99%

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Simultaneous magnetic and electrostatic driving of microcantilevers

Malo

Izpura

2007

Sensors and Actuators A: Physical

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Section: Measurements Under Coherent Drivingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Simultaneous magnetic and electrostatic driving of microcantilevers

Malo

Izpura

2007

Sensors and Actuators A: Physical

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“…Electrostatic excitation is a well-known and widely used technique for dynamic characterization [7][8][9][10][11][12][13], especially in configuration where the resonator oscillates in a vacuum. However both analytical [7] and experimental results [8,10,11] show that the resonant frequency decreases significantly with increasing magnitude of applied bias voltage, i.e. different bias voltages result in different resonant frequencies.…”

Section: Introductionmentioning

confidence: 99%

Non-contact evaluation of the resonant frequency of a microstructure using ultrasonic wave

Kang

Tay

et al. 2009

Acta Mech Sin

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This paper presents a novel non-contact method for evaluating the resonant frequency of a microstructure. Firstly, the microstructure under test is excited by ultrasonic waves. This excitation method does not impose any undefined load on the specimen like the electrostatic excitation and also this is the first actual use of ultrasonic wave for exciting a microstructure in the literature. Secondly, the amplitudes of the microstructure are determined by image edge detection using a Mexican hat wavelet transform on the vibrating images of the microstructure. The vibrating images are captured by a CCD camera when the microstructure is vibrated by ultrasonic waves at a series of discrete high frequencies (>30 kHz). Upon processing the vibrating images, the amplitudes at various excitation frequencies are obtained and an amplitude-frequency spectrum is obtained from which the resonant frequency is subsequently evaluated. A micro silicon structure consisting of a perforated plate (192×192 µm) and two cantilever beams (76 × 43 µm) which is about 4 µm thickness is tested. Since laser interferometry is not required, thermal effects on a test object can be avoided. Hence, the setup is relatively simple. Results show that the proposed method is a simple and effective approach for evaluating the dynamic characteristics of microstructures.

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“…Another issue directly related to the dynamic characterization is the excitation of a MEME structure. Electrostatic excitation is a well-known and widely used technique for loading a microresonator [8][9][10][11][12], especially in situation where the resonator oscillates in a vacuum. However both analytical [8] and experimental results [8,11,12] show that the resonant frequency would decrease significantly with the increasing magnitude of the applied bias voltage which means that different bias voltages will result in different resonant frequencies.…”

Section: Introductionmentioning

confidence: 99%

“…Electrostatic excitation is a well-known and widely used technique for loading a microresonator [8][9][10][11][12], especially in situation where the resonator oscillates in a vacuum. However both analytical [8] and experimental results [8,11,12] show that the resonant frequency would decrease significantly with the increasing magnitude of the applied bias voltage which means that different bias voltages will result in different resonant frequencies. The reason is that the stiffness of a MEME structure would be periodically reduced with the frequency of the applied voltage, in addition the stiffness variation increases with the increasing magnitude of the applied voltage [9].…”

Section: Introductionmentioning

confidence: 99%

Dynamic characterization of MEMS structures by ultrasonic wave excitation

Kang

Tay

Quan

et al. 2007

J. Micromech. Microeng.

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A novel optical method for evaluating the natural frequency and the quality factor (Q) of a MEME structure is proposed in this paper. The proposed method is based on ultrasonic wave excitation which is a non-contact technique and does not impose undefined loadings. Images of the MEME structure vibrated ultrasonically are captured by a CCD camera at different frequencies. The vibrational amplitudes of the MEME structure are subsequently extracted using edge detection based on a Mexican hat wavelet transform and an amplitude-frequency spectrum is obtained from which the resonant frequency is determined. The damping characteristic is subsequently evaluated using a half-power-point method. A silicon MEME structure consisting of a perforated crossbeam (205 µm × 26 µm) and a cantilever beam (220 µm × 23 µm) is tested. The thickness of the MEME structure is approximately 3 µm. The experimental set-up is relatively simple and the results show that the proposed method is an effective approach for evaluating the dynamic characteristics of the MEME structure.

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Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage

Cited by 9 publications

References 5 publications

Simultaneous magnetic and electrostatic driving of microcantilevers

Simultaneous magnetic and electrostatic driving of microcantilevers

Non-contact evaluation of the resonant frequency of a microstructure using ultrasonic wave

Dynamic characterization of MEMS structures by ultrasonic wave excitation

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