2009
DOI: 10.1007/s10409-009-0300-4
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Non-contact evaluation of the resonant frequency of a microstructure using ultrasonic wave

Abstract: This paper presents a novel non-contact method for evaluating the resonant frequency of a microstructure. Firstly, the microstructure under test is excited by ultrasonic waves. This excitation method does not impose any undefined load on the specimen like the electrostatic excitation and also this is the first actual use of ultrasonic wave for exciting a microstructure in the literature. Secondly, the amplitudes of the microstructure are determined by image edge detection using a Mexican hat wavelet transform … Show more

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Cited by 2 publications
(2 citation statements)
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“…Huber et al utilized the ultrasonic radiation force to excite a MEMS mirror and MEMS gyroscope for modal testing [18]. Kang et al exploited the ultrasonic radiation force to excite a micro-cantilever for evaluating its dynamic response [19]. It proved the feasibility of using ultrasonic radiation force to excite the microstructures.…”
Section: Ultrasonic Excitation Methodologymentioning
confidence: 99%
“…Huber et al utilized the ultrasonic radiation force to excite a MEMS mirror and MEMS gyroscope for modal testing [18]. Kang et al exploited the ultrasonic radiation force to excite a micro-cantilever for evaluating its dynamic response [19]. It proved the feasibility of using ultrasonic radiation force to excite the microstructures.…”
Section: Ultrasonic Excitation Methodologymentioning
confidence: 99%
“…Huber et al (2007) utilized the ultrasonic radiation force to excite a MEMS mirror and MEMS gyroscope for modal testing. Kang et al (2010) exploited the ultrasonic radiation force to excite a micro-cantilever for evaluating its dynamic response. It proved the feasibility of using ultrasonic radiation force to excite the microstructures.…”
Section: Theoretical Basis Of Ultrasonic Excitation and Vibration Anamentioning
confidence: 99%