Depolarization correction method for ellipsometric measurements of large grain size zinc-oxide films

Pápa, Zsuzsanna; Budai, Judit; Hanyecz, I.; Csontos, József; Tóth, Z.

doi:10.1016/j.tsf.2013.10.184

Cited by 5 publications

(3 citation statements)

References 11 publications

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“…It is based on the measurement of the change in polarization state of light when reflected from the sample. Although the optimal samples show specular reflection, with the use of proper correction methods developed recently, samples with significant diffuse scattering can also be measured [16,17].…”

Section: Introductionmentioning

confidence: 99%

Determination of UV–visible–NIR absorption coefficient of graphite bulk using direct and indirect methods

et al. 2017

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Absorption coefficient of graphite bulk pressed from 1-5 micrometers size crystalline grains was measured in UV-Vis-NIR range with three different methods: i) determination of pulsed laser ablation rate as the function of laser fluence for different wavelengths ˙(248nm, 337 nm, 532 nm and 1064 nm, respectively); ii) production of aerosol particles by UV laser ablation of the bulk graphite in inert atmosphere and determination of the mass-specific absorption coefficient with a four-wavelength (266 nm, 355 nm, 532 nm and 1064 nm, respectively) photoacoustic spectrometer and iii) spectroscopic ellipsometry in 250-1000 nm range. Taking into account the wide range of the absorption coefficients available in for the different carbon structures, an overall relatively good agreement was observed for the three methods. The ellipsometric results fit well with the ablation rate measurement, the data obtained with photoacoustic method are also similar in the UV and NIR region, however the values were somewhat higher in visible and near-UV range. Taking into account the limitations of the methods, they can be promising candidates for the determination of absorption coefficient when the samples are strongly scattering and there is no possibility to perform transitivity measurements.

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Section: Introductionmentioning

confidence: 99%

Determination of UV–visible–NIR absorption coefficient of graphite bulk using direct and indirect methods

et al. 2017

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“…The effective medium approximation used to model the bulk layer is only valid where the size of phases are smaller than one tenth of the probing wavelength [33]. Additionally, surface roughness resulting from the overgrowth of competing crystallites can lead to scattering of the incident light, leading to depolarisation [33,34]. These issues were evident in the initial analysis of spectra taken between 193 and 1000 nm.…”

Section: Holdermentioning

confidence: 99%

Mapping the effect of substrate temperature inhomogeneity during microwave plasma-enhanced chemical vapour deposition nanocrystalline diamond growth

Leigh

Cuenca

Thomas

et al. 2023

Carbon

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“…There are other possible sources of depolarization which can occur in the case of parallel beam measurements as well, and which may affect the results of the ellipsometric evaluation, like the finite bandwidth of the spectrograph [18,19] and the inhomogeneity of film thickness. Most of the depolarization sources can be handled during the evaluation [20][21][22][23]. The description and handling of these sources are in the focus of intense research, meaning not only the development of new mathematical formulae [24], but also new measurement techniques [25].…”

Section: Introductionmentioning

confidence: 99%

Spectroscopic ellipsometric investigation of graphene and thin carbon films from the point of view of depolarization effects

Pápa

Csontos

Smausz

et al. 2017

Applied Surface Science

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A spectroscopic ellipsometric study of single-, double-and five-layer graphene transferred to thick SiO 2 support layers is presented. Depolarization measurements showed significant peaks. To understand the nature of this depolarization, a sample series consisting of SiO 2 support layers of different thicknesses covered with thin pulsed laser deposited carbon layers is also studied. Our investigations show that depolarization originates both from the measurement conditions and from the sample properties, and becomes significant due to the presence of the support layer. Our findings reveal that the observable depolarization peaks diminish with the increase of absorption and thickness of the layer covering the support layer. Since the support layer is generally used to increase the sensitivity of ellipsometry based on the interference enhancement method, we study the influence of depolarization on the results of ellipsometric evaluation. It is shown that neglecting depolarization during the analysis can cause significant inaccuracy in the deduced thickness and optical properties of graphene. This difference decreases with increasing layer number, i.e. with increasing graphene thickness. This effect is also shown for thicker test carbon layer series. _____________________________

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Depolarization correction method for ellipsometric measurements of large grain size zinc-oxide films

Cited by 5 publications

References 11 publications

Determination of UV–visible–NIR absorption coefficient of graphite bulk using direct and indirect methods

Determination of UV–visible–NIR absorption coefficient of graphite bulk using direct and indirect methods

Mapping the effect of substrate temperature inhomogeneity during microwave plasma-enhanced chemical vapour deposition nanocrystalline diamond growth

Spectroscopic ellipsometric investigation of graphene and thin carbon films from the point of view of depolarization effects

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