Deposition and annealing of lead scandium tantalate thin films for high performance thermal detector arrays

et al. 2004

The phase transformations from amorphous to pyrochlore to perovskite in lead scandium tantalate (PST) thin films during rapid thermal annealing process (RTA) have been studied. Volume fractions for pyrochlore and perovskite were obtained from their respective X-ray diffraction intensities. Two models assuming the starting phase being pure amorphous or pyrochlore were analysed in detail. Equations have been derived and numerical calculation used to simulate the volume fractions for each phase as functions of annealing time. Transformation parameters k and n were obtained by comparing experiment with simulation using a least-squares curve fitting technique.

Section: Methodsmentioning

confidence: 99%

Kinetics of Phase Transformations in Lead Scandium Tantalate Thin Films

Battat

et al. 2004

“…The PST was deposited by sputtering in a custom sputtering system which uses dual 8'' diameter RF magnetron sputtering targets in an argon/10% oxygen atmosphere. More details have been published elsewhere [6][7]. The as-deposited wafer was cut into several pieces of squares about 10 mm x mm, and each piece was then subjected to a series of RTA and structural characterisation processes.…”

Section: Methodsmentioning

confidence: 99%

“…Todd et. Al [6][7] reported growth of perovskite PST at 530 °C by using sputtering techniques. However, in-situ perovskite PST sputtering at elevated temperature can lead to difficulties with lead compositional control and problems with equipment reliability.…”

Section: Introductionmentioning

confidence: 99%

A Model of Phase Transition Kinetics in Lead Scandium Tantalate Thin Films

Battat

et al. 2003

The phase transformations from amorphous to pyrochlore to perovskite in lead scandium tantalate (PST) thin films during rapid thermal annealing process (RTA) have been studied by X-ray diffraction (XRD) techniques. The growth and decay of the pyrochlore phase, the growth of the perosvkite PST were analysed using the Avrami model. Integral equations have been derived and numerical calculation been used to simulate the volume fractions for pyrochlore and perovskite as functions of annealing time. Transformation parameters k and n were obtained by comparing the simulated to the experimental intensities using a least-squares curve fitting technique. Activation energies for perovskite formation were calculated. The results indicate that the phase transitions are diffusion-limited. TEM, SEM, and EDS were employed to study the lead loss and other factors affecting phase transitions.

“…Sputtering deposition was carried out in a custom sputtering system which uses dual RF magnetron sputtering targets in an argon/10% oxygen atmosphere. More details have been published elsewhere [4,5]. Films were deposited at 300 °C For sol-gel deposition, precursors were first prepared.…”

Section: Methodsmentioning

confidence: 99%

“…3H 2 O : IPA 1g:1ml. Ta(OEt) 5 and Sc(OAc) 3 was mixed in IPA with the ratio of Ta(OEt) 5 : IPA 1g: 60ml. A lead zirconate titanate (PZT) layer was first coated on a Pt/Ti/SiO 2 /Si substrate as a seeding layer in an attempt to reduce PST crystallisation temperature.…”

Section: Methodsmentioning

confidence: 99%

Comparative Studies of PST Thin Films as Prepared by Sol-Gel, LDCVD and Sputtering Techniques

Zhang

et al. 2002

Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity ε r , dielectric loss tanδ, pyroelectric coefficient p, and thermal detection figure of merit F d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to produce high quality PST thin films.