Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge

Characterization and Properties of Ge1–x–Cx:H Compounds Obtained by X‐ray CVD of Germane/Ethyne Systems: Effect of the Irradiation Dose

“…The density values, measured with a Berman balance (vs. toluene), range between 1.60 g cm -3 and 2.05 g cm -3 , in good agreement with the results obtained by Gazicki et al [21] and Ge/C in the solid Ge/C in gas phase Fig. 2.…”

“…In fact, hydrogen atoms can react with dangling bonds and the passivation strongly affect the optical and electrical properties of the material. The IR spectra of the solids obtained from radiolysis of GeH 4 /C 2 H 2 mixtures are similar to those obtained by Gazicki and co-workers from tetraethyl and tetramethylgermanium in an rf glow discharge, [21,37] and four regions can be identified. In the regions between 2800 cm -1 and 3000 cm -1 , and around 2000 cm -1 the stretching of C-H bonds and Ge-H bonds, respectively occur, whereas between 1200 cm -1 and 1500 cm -1 , the bond bending signals of C(H) n groups are usually found.…”

“…We assign the band at 1455 cm -1 and at about 1380 cm -1 to asymmetric and symmetric CH 2 bending modes, respectively. [1,21,32,37,41,43] Another peak is present at about 1410 cm -1 . Considering the absence of stretching signals attributable to CH 3 groups, it can be attributed to C-CH 2 -Ge or Ge-CH 2 -Ge bending mode.…”

“…In the regions between 2800 cm -1 and 3000 cm -1 , and around 2000 cm -1 the stretching of C-H bonds and Ge-H bonds, respectively occur, whereas between 1200 cm -1 and 1500 cm -1 , the bond bending signals of C(H) n groups are usually found. [1,7,21,[36][37][38][39][40][41][42][43][44] The fourth region, between 400 cm -1 and 1200 cm -1 is characterized by broad and overlapping bands attributable to stretching, bending, wagging, and rocking vibrations of various bond systems such as Ge-H, Ge-C, CH 2 , and Ge-C-C. ). [7,21,[37][38][39][40][41][42][43][44] Signals attributable to the stretching of the C-H bond in the CH 3 group are only observed in the spectrum of the solid obtained from irradiation of the mixture with 10 % ethyne after 1.5 h of radiolysis.…”

“…The band observed in the region between 950 cm -1 and 1200 cm -1 was attributed to the rocking or wagging modes of (CH m ) n -C/Ge (m=1,2; n=1-3) groups, [1,32,41,43] and to the C-C skeletal stretching vibrations. [21,37] In the wavenumber region between 500 cm -1 and 900 cm -1 , the interpretation of the spectra is complicated by the presence of several signals leading to broad overlapped bands due to the GeCH n (n=1,2) and GeH 2 bending modes, the Ge-C stretching, the CH 2 rocking, and Ge-H wagging modes. [1,7,21,37,40,42] The possible shift of vibrational modes due to changes in the environment must also be taken into account.…”